end-to-end done

Signed-off-by: Sean Cross <sean@xobs.io>
This commit is contained in:
Sean Cross 2023-04-10 23:46:23 +08:00
parent 86a661f686
commit 980fa41bf9
28 changed files with 1267 additions and 131 deletions

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<svg xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink" version="1.1" id="metal_stack" width="500" height="500" viewBox="-6 -6 1857 1665">
<desc>
XCircuit Version 3.10
File "metal_stack.ps" Page 1
</desc>
<g stroke="black">
<path d="M819,555 L819,539 955,539 955,555 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M827,747 L827,715 923,715 923,747 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M835,539 L835,491 931,491 931,539 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M755,1371 L755,1323 851,1323 851,1371 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,1291 L1075,1211 1171,1211 1171,1291 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,1131 L1075,1067 1171,1067 1171,1131 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,987 L1075,923 1171,923 1171,987 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,779 L1075,715 1171,715 1171,779 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,571 L1075,491 1235,491 1235,571 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M1075,1483 L1075,1323 1171,1323 1171,1483 z" fill="#cccccc" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M483,1483 L483,1547 C483,1565 497,1579 515,1579 L1491,1579 C1509,1579 1523,1565 1523,1547 L1523,1483 " fill="#fbfec3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#fbfec3"/>
<path d="M931,1483 L931,1499 C931,1517 945,1531 963,1531 L1443,1531 C1461,1531 1475,1517 1475,1499 L1475,1483 " fill="#faca8a" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#faca8a"/>
<path d="M723,1435 L723,1371 883,1371 883,1435 z" fill="#ffc0cb" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#ffc0cb"/>
<path d="M1235,1467 L1235,1403 1443,1403 1443,1467 z" fill="#ffc0cb" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#ffc0cb"/>
<path d="M643,1323 L643,1291 1555,1291 1555,1323 z" fill="#cffecf" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cffecf"/>
<path d="M643,1211 L643,1131 1587,1131 1587,1211 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M643,1067 L643,987 1587,987 1587,1067 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M643,923 L643,779 1619,779 1619,923 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M643,715 L643,571 1619,571 1619,715 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M659,491 L659,283 1571,283 1571,491 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<g transform="matrix( 1 0 -0 1 950 27)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">(Diagram not to scale!)</tspan>
</text></g>
<path d="M443,1483 L1619,1483 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M931,1483 L931,1499 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1475,1483 L1475,1499 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M931,1499 A32,32 0 0,0 963,1531 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M963,1531 L1443,1531 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1443,1531 A32,32 0 0,0 1475,1499 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M483,1483 L483,1547 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1523,1483 L1523,1547 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M515,1579 L1491,1579 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M483,1547 A32,32 0 0,0 515,1579 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1491,1579 A32,32 0 0,0 1523,1547 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1075 1515)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">diffusion</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 819 1531)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">nwell</tspan>
</text></g>
<path d="M1235,1467 L1235,1403 1443,1403 1443,1467 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1347 1435)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-89" y="-6">polysilicon</tspan><tspan x="-33" y="34">gate</tspan>
</text></g>
<path d="M1075,1483 L1075,1323 1171,1323 1171,1483 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1411)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-40" y="14">licon</tspan>
</text></g>
<path d="M643,1323 L643,1291 1555,1291 1555,1323 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1307)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-11" y="14">li</tspan>
</text></g>
<path d="M643,1211 L643,1131 1587,1131 1587,1211 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1179)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal1</tspan>
</text></g>
<path d="M643,1067 L643,987 1587,987 1587,1067 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1035)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal2</tspan>
</text></g>
<path d="M643,923 L643,779 1619,779 1619,923 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 859)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal3</tspan>
</text></g>
<path d="M643,715 L643,571 1619,571 1619,715 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 651)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal4</tspan>
</text></g>
<path d="M659,491 L659,283 1571,283 1571,491 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 395)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-55" y="0">metal5</tspan>
</text></g>
<path d="M1075,1291 L1075,1211 1171,1211 1171,1291 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1259)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-45" y="9">mcon</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 803 1355)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-40" y="0">licon</tspan>
</text></g>
<path d="M1075,1131 L1075,1067 1171,1067 1171,1131 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1075,987 L1075,923 1171,923 1171,987 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1075,779 L1075,715 1171,715 1171,779 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1075,571 L1075,491 1235,491 1235,571 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1123 1099)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via1</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1123 955)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via2</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1123 747)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via3</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1155 539)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via4</tspan>
</text></g>
<path d="M739,187 L739,139 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1523,187 L1523,139 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1555,107 L1795,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M707,107 L227,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M739,139 A32,32 0 0,0 707,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1555,107 A32,32 0 0,0 1523,139 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1155 155)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-70" y="0">glass cut</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 475 339)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-94" y="0">PI1 K=2.94</tspan>
</text></g>
<path d="M1715,1483 L1827,1483 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1539,1531 L1827,1531 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1803,1559 C1798,1549 1798,1546 1795,1531 C1792,1546 1792,1549 1787,1559 C1793,1557 1797,1557 1803,1559 " fill="#000000" stroke="none"/>
<path d="M1803,1455 C1798,1465 1798,1468 1795,1483 C1792,1468 1792,1465 1787,1455 C1793,1457 1797,1457 1803,1455 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 1795 1515)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-63" y="0">0.12<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="22" y="0">µm</tspan></text>
</text></g>
<path d="M1507,1467 L1747,1467 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1507,1403 L1747,1403 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1683,1403 L1683,1355 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1683,1467 L1683,1515 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1691,1495 C1686,1485 1686,1482 1683,1467 C1680,1482 1680,1485 1675,1495 C1681,1493 1685,1493 1691,1495 " fill="#000000" stroke="none"/>
<path d="M1691,1375 C1686,1385 1686,1388 1683,1403 C1680,1388 1680,1385 1675,1375 C1681,1377 1685,1377 1691,1375 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 1715 1435)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-63" y="14">0.18<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="20" y="14">µm</tspan></text>
</text></g>
<path d="M1635,1323 L1731,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1563,1291 L1731,1291 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1715,1291 L1715,1243 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1715,1323 L1715,1371 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1723,1351 C1718,1341 1718,1338 1715,1323 C1712,1338 1712,1341 1707,1351 C1713,1349 1717,1349 1723,1351 " fill="#000000" stroke="none"/>
<path d="M1723,1263 C1718,1273 1718,1276 1715,1291 C1712,1276 1712,1273 1707,1263 C1713,1265 1717,1265 1723,1263 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 1307)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.1<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="59" y="14">µm</tspan></text>
</text></g>
<path d="M1635,1211 L1731,1211 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,1131 L1731,1131 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1723,1159 C1718,1149 1718,1146 1715,1131 C1712,1146 1712,1149 1707,1159 C1713,1157 1717,1157 1723,1159 " fill="#000000" stroke="none"/>
<path d="M1723,1183 C1718,1193 1718,1196 1715,1211 C1712,1196 1712,1193 1707,1183 C1713,1185 1717,1185 1723,1183 " fill="#000000" stroke="none"/>
<path d="M1715,1211 L1715,1131 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 1179)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.36</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="80" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1635,1067 L1731,1067 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,987 L1731,987 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1723,1015 C1718,1005 1718,1002 1715,987 C1712,1002 1712,1005 1707,1015 C1713,1013 1717,1013 1723,1015 " fill="#000000" stroke="none"/>
<path d="M1723,1039 C1718,1049 1718,1052 1715,1067 C1712,1052 1712,1049 1707,1039 C1713,1041 1717,1041 1723,1039 " fill="#000000" stroke="none"/>
<path d="M1715,1067 L1715,987 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 1035)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.36</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="80" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1635,923 L1731,923 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,779 L1731,779 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1723,807 C1718,797 1718,794 1715,779 C1712,794 1712,797 1707,807 C1713,805 1717,805 1723,807 " fill="#000000" stroke="none"/>
<path d="M1723,895 C1718,905 1718,908 1715,923 C1712,908 1712,905 1707,895 C1713,897 1717,897 1723,895 " fill="#000000" stroke="none"/>
<path d="M1715,923 L1715,779 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 859)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.845</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="104" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1635,715 L1731,715 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,571 L1731,571 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1723,599 C1718,589 1718,586 1715,571 C1712,586 1712,589 1707,599 C1713,597 1717,597 1723,599 " fill="#000000" stroke="none"/>
<path d="M1723,687 C1718,697 1718,700 1715,715 C1712,700 1712,697 1707,687 C1713,689 1717,689 1723,687 " fill="#000000" stroke="none"/>
<path d="M1715,715 L1715,571 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1747 651)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.845</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="104" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1635,491 L1731,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1635,283 L1747,283 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1691,311 C1686,301 1686,298 1683,283 C1680,298 1680,301 1675,311 C1681,309 1685,309 1691,311 " fill="#000000" stroke="none"/>
<path d="M1691,463 C1686,473 1686,476 1683,491 C1680,476 1680,473 1675,463 C1681,465 1685,465 1691,463 " fill="#000000" stroke="none"/>
<path d="M1683,491 L1683,283 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1715 395)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">1.26</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="76" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1795,1483 L1795,1419 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1795,1531 L1795,1595 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M723,1435 L723,1371 883,1371 883,1435 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 803 1403)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-77" y="14">field poly</tspan>
</text></g>
<path d="M427,1483 L51,1483 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M387,1435 L299,1435 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M371,1483 L371,1547 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M379,1511 C374,1501 374,1498 371,1483 C368,1498 368,1501 363,1511 C369,1509 373,1509 379,1511 " fill="#000000" stroke="none"/>
<path d="M371,1435 L371,1387 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M379,1407 C374,1417 374,1420 371,1435 C368,1420 368,1417 363,1407 C369,1409 373,1409 379,1407 " fill="#000000" stroke="none"/>
<path d="M355,1323 L251,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M275,1483 L275,1419 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M283,1351 C278,1341 278,1338 275,1323 C272,1338 272,1341 267,1351 C273,1349 277,1349 283,1351 " fill="#000000" stroke="none"/>
<path d="M283,1455 C278,1465 278,1468 275,1483 C272,1468 272,1465 267,1455 C273,1457 277,1457 283,1455 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 363 1467)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">0.3262<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="56" y="0">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 347 1403)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-166" y="14">0.9361<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-43" y="14">µm</tspan></text>
</text></g>
<path d="M355,1211 L139,1211 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M275,1387 L275,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M147,1483 L147,1291 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M147,1251 L147,1211 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M155,1455 C150,1465 150,1468 147,1483 C144,1468 144,1465 139,1455 C145,1457 149,1457 155,1455 " fill="#000000" stroke="none"/>
<path d="M155,1239 C150,1229 150,1226 147,1211 C144,1226 144,1229 139,1239 C145,1237 149,1237 155,1239 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 195 1283)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">1.3761</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="25" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M355,1067 L123,1067 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M131,1115 L131,1067 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M139,1095 C134,1085 134,1082 131,1067 C128,1082 128,1085 123,1095 C129,1093 133,1093 139,1095 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 187 1147)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">2.0061</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="45" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M355,923 L107,923 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M115,971 L115,923 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M123,951 C118,941 118,938 115,923 C112,938 112,941 107,951 C113,949 117,949 123,951 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 171 1003)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">2.7861<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="46" y="0">µm</tspan></text>
</text></g>
<path d="M355,715 L91,715 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M99,779 L99,715 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M107,743 C102,733 102,730 99,715 C96,730 96,733 91,743 C97,741 101,741 107,743 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 155 811)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">4.0211<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="40" y="0">µm</tspan></text>
</text></g>
<path d="M299,491 L75,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M83,571 L83,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M91,519 C86,509 86,506 83,491 C80,506 80,509 75,519 C81,517 85,517 91,519 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 139 603)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">5.3711<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="30" y="0">µm</tspan></text>
</text></g>
<path d="M211,107 L35,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cccccc"/>
<path d="M67,219 L67,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M75,135 C70,125 70,122 67,107 C64,122 64,125 59,135 C65,133 69,133 75,135 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 107 251)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-93" y="0">11.8834<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="46" y="0">µm</tspan></text>
</text></g>
<path d="M403,1435 L675,1435 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 587 1467)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-191" y="0">FOX K=3.9</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1571 1563)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">p-substrate</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 523 1379)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-185" y="14">PSG K=3.9</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1531 1275)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-202" y="14">LINT K=7.3</tspan>
</text></g>
<path d="M643,1323 L363,1323 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 547 1251)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-246" y="14">NILD2 K=4.05</tspan>
</text></g>
<path d="M371,1211 L643,1211 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M371,1067 L643,1067 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M371,923 L643,923 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M371,715 L643,715 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M315,491 L635,491 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 1563 1115)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-273" y="0">NILD3_C K=3.5</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 547 1011)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-226" y="0">NILD4 K=4.2</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 547 835)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-226" y="0">NILD5 K=4.1</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 547 627)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-226" y="0">NILD6 K=4.0</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 547 1155)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-226" y="0">NILD3 K=4.5</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1563 971)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-273" y="0">NILD4_C K=3.5</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1427 251)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-244" y="0">TOPOX K=3.9</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 35 1483)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-50" y="14">0.0</tspan>
</text></g>
<path d="M691,1259 L691,1307 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M699,1287 C694,1277 694,1274 691,1259 C688,1274 688,1277 683,1287 C689,1285 693,1285 699,1287 " fill="#000000" stroke="none"/>
<path d="M699,1183 C694,1193 694,1196 691,1211 C688,1196 688,1193 683,1183 C689,1185 693,1185 699,1183 " fill="#000000" stroke="none"/>
<path d="M683,1095 C678,1085 678,1082 675,1067 C672,1082 672,1085 667,1095 C673,1093 677,1093 683,1095 " fill="#000000" stroke="none"/>
<path d="M683,1103 C678,1113 678,1116 675,1131 C672,1116 672,1113 667,1103 C673,1105 677,1105 683,1103 " fill="#000000" stroke="none"/>
<path d="M675,1067 L675,1131 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M683,951 C678,941 678,938 675,923 C672,938 672,941 667,951 C673,949 677,949 683,951 " fill="#000000" stroke="none"/>
<path d="M683,959 C678,969 678,972 675,987 C672,972 672,969 667,959 C673,961 677,961 683,959 " fill="#000000" stroke="none"/>
<path d="M675,923 L675,987 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M683,743 C678,733 678,730 675,715 C672,730 672,733 667,743 C673,741 677,741 683,743 " fill="#000000" stroke="none"/>
<path d="M683,751 C678,761 678,764 675,779 C672,764 672,761 667,751 C673,753 677,753 683,751 " fill="#000000" stroke="none"/>
<path d="M675,715 L675,779 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M683,519 C678,509 678,506 675,491 C672,506 672,509 667,519 C673,517 677,517 683,519 " fill="#000000" stroke="none"/>
<path d="M683,543 C678,553 678,556 675,571 C672,556 672,553 667,543 C673,545 677,545 683,543 " fill="#000000" stroke="none"/>
<path d="M675,491 L675,571 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M939,135 C934,125 934,122 931,107 C928,122 928,125 923,135 C929,133 933,133 939,135 " fill="#000000" stroke="none"/>
<path d="M939,255 C934,265 934,268 931,283 C928,268 928,265 923,255 C929,257 933,257 939,255 " fill="#000000" stroke="none"/>
<path d="M931,107 L931,283 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M739,107 L963,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 651 1235)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.265</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="108" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M755,1371 L755,1323 851,1323 851,1371 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 691 1099)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.27</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="84" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 691 955)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.42</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="84" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 691 747)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.39</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="76" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 691 531)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.505</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="106" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 947 211)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">5.2523</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="126" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1395 1347)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-182" y="14">IOX K=3.9</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1427 1387)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-222" y="14">SPNIT K=7.5</tspan>
</text></g>
<path d="M1443,1467 L1443,1403 1459,1403 1459,1467 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1459,1467 L1491,1467 1491,1371 1187,1371 1187,1467 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,1211 L1587,1131 1619,1131 1619,1211 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,1067 L1587,987 1619,987 1619,1067 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M883,1435 L883,1371 899,1371 899,1435 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M899,1435 L931,1435 931,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M723,1435 L707,1435 707,1371 723,1371 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M707,1435 L675,1435 675,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M675,1339 L755,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M931,1339 L851,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1187,1467 L1219,1467 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1219,1467 L1219,1403 1235,1403 1235,1467 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1507,1371 L1635,1371 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 1523 1387)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.121<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="101" y="14">µm</tspan></text>
</text></g>
<path d="M1571,955 L1587,955 1603,1003 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1571,1107 L1587,1107 1603,1155 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1451,1411 L1435,1347 1403,1347 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1547,1431 C1542,1421 1542,1418 1539,1403 C1536,1418 1536,1421 1531,1431 C1537,1429 1541,1429 1547,1431 " fill="#000000" stroke="none"/>
<path d="M1539,1403 L1539,1443 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1547,1343 C1542,1353 1542,1356 1539,1371 C1536,1356 1536,1353 1531,1343 C1537,1345 1541,1345 1547,1343 " fill="#000000" stroke="none"/>
<path d="M1539,1371 L1539,1331 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M931,1435 L1075,1435 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 1059 1387)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-166" y="14">0.6099<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-33" y="14">µm</tspan></text>
</text></g>
<path d="M995,1371 L995,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M995,1403 L995,1435 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1003,1407 C998,1417 998,1420 995,1435 C992,1420 992,1417 987,1407 C993,1409 997,1409 1003,1407 " fill="#000000" stroke="none"/>
<path d="M1003,1351 C998,1341 998,1338 995,1323 C992,1338 992,1341 987,1351 C993,1349 997,1349 1003,1351 " fill="#000000" stroke="none"/>
<path d="M1587,1299 L1587,1259 1171,1259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M979,1259 L915,1259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M955,1231 C950,1241 950,1244 947,1259 C944,1244 944,1241 939,1231 C945,1233 949,1233 955,1231 " fill="#000000" stroke="none"/>
<path d="M955,1319 C950,1309 950,1306 947,1291 C944,1306 944,1309 939,1319 C945,1317 949,1317 955,1319 " fill="#000000" stroke="none"/>
<path d="M947,1291 L947,1339 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M947,1259 L947,1219 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 947 1275)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-73" y="14">0.075</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="33" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1587,1299 L1619,1299 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1619,1323 L1555,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M579,1291 L611,1291 611,1259 1075,1259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M571,1291 L363,1291 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 523 1307)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-202" y="14">LINT K=7.3</tspan>
</text></g>
<path d="M355,1291 L203,1291 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M219,1339 L219,1291 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M227,1319 C222,1309 222,1306 219,1291 C216,1306 216,1309 211,1319 C217,1317 221,1317 227,1319 " fill="#000000" stroke="none"/>
<path d="M227,1455 C222,1465 222,1468 219,1483 C216,1468 216,1465 211,1455 C217,1457 221,1457 227,1455 " fill="#000000" stroke="none"/>
<path d="M219,1483 L219,1379 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 267 1355)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-166" y="14">1.0111<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-59" y="14">µm</tspan></text>
</text></g>
<path d="M691,1211 L691,1163 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M755,283 L755,259 643,259 643,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1475,283 L1475,259 1587,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,259 L1587,491 1571,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1635,259 L1747,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1739,323 L1739,283 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1739,259 L1739,179 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1747,311 C1742,301 1742,298 1739,283 C1736,298 1736,301 1731,311 C1737,309 1741,309 1747,311 " fill="#000000" stroke="none"/>
<path d="M1747,231 C1742,241 1742,244 1739,259 C1736,244 1736,241 1731,231 C1737,233 1741,233 1747,231 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 1763 283)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">0.09</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="82" y="0"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M1435,243 L1467,243 1491,275 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<g transform="matrix( 0.7 0 -0 0.7 579 475)" fill="#0000ff">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-253" y="0">TOPNIT K=7.5</tspan>
</text></g>
<path d="M571,443 L611,443 611,187 755,187 755,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1475,259 L1475,187 1611,187 1611,435 1619,435 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,491 L1619,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M571,443 L291,443 " fill="none" style="stroke-dasharray:4,4" stroke-width="2" stroke-linecap="butt" stroke-linejoin="bevel" stroke="#999999"/>
<path d="M299,491 L299,563 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M299,443 L299,379 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M307,415 C302,425 302,428 299,443 C296,428 296,425 291,415 C297,417 301,417 307,415 " fill="#000000" stroke="none"/>
<path d="M307,519 C302,509 302,506 299,491 C296,506 296,509 291,519 C297,517 301,517 307,519 " fill="#000000" stroke="none"/>
<path d="M643,491 L659,491 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M771,187 L859,187 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M763,259 L859,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M795,259 L795,187 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M803,215 C798,205 798,202 795,187 C792,202 792,205 787,215 C793,213 797,213 803,215 " fill="#000000" stroke="none"/>
<path d="M803,231 C798,241 798,244 795,259 C792,244 792,241 787,231 C793,233 797,233 803,231 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 811 227)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.54</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="80" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 299 475)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">0.3777<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="46" y="0">µm</tspan></text>
</text></g>
<path d="M339,251 L339,107 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M347,415 C342,425 342,428 339,443 C336,428 336,425 331,415 C337,417 341,417 347,415 " fill="#000000" stroke="none"/>
<path d="M347,135 C342,125 342,122 339,107 C336,122 336,125 331,135 C337,133 341,133 347,135 " fill="#000000" stroke="none"/>
<path d="M339,443 L339,299 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 363 283)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="0">6.1346<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="40" y="0">µm</tspan></text>
</text></g>
<path d="M139,1455 C134,1465 134,1468 131,1483 C128,1468 128,1465 123,1455 C129,1457 133,1457 139,1455 " fill="#000000" stroke="none"/>
<path d="M131,1483 L131,1155 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M123,1455 C118,1465 118,1468 115,1483 C112,1468 112,1465 107,1455 C113,1457 117,1457 123,1455 " fill="#000000" stroke="none"/>
<path d="M115,1483 L115,1011 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M107,1455 C102,1465 102,1468 99,1483 C96,1468 96,1465 91,1455 C97,1457 101,1457 107,1455 " fill="#000000" stroke="none"/>
<path d="M99,1483 L99,819 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M91,1455 C86,1465 86,1468 83,1483 C80,1468 80,1465 75,1455 C81,1457 85,1457 91,1455 " fill="#000000" stroke="none"/>
<path d="M83,1483 L83,619 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M67,1483 L67,259 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M75,1455 C70,1465 70,1468 67,1483 C64,1468 64,1465 59,1455 C65,1457 69,1457 75,1455 " fill="#000000" stroke="none"/>
<path d="M819,555 L819,539 955,539 955,555 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M835,539 L835,491 931,491 931,539 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M827,747 L827,715 923,715 923,747 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M811,763 L811,747 947,747 947,763 z" fill="#cbf3f3" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#cbf3f3"/>
<path d="M811,763 L811,747 947,747 947,763 z" fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 971 555)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">cap2m</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 883 515)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via4</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 875 731)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-35" y="14">via3</tspan>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 963 763)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="0">capm</tspan>
</text></g>
<path d="M691,1371 L603,1371 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M635,1295 C630,1305 630,1308 627,1323 C624,1308 624,1305 619,1295 C625,1297 629,1297 635,1295 " fill="#000000" stroke="none"/>
<path d="M627,1275 L627,1323 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M635,1399 C630,1389 630,1386 627,1371 C624,1386 624,1389 619,1399 C625,1397 629,1397 635,1399 " fill="#000000" stroke="none"/>
<path d="M627,1371 L627,1419 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 603 1347)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-83" y="14">0.4299</tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="41" y="14"><tspan dx="7">µm</tspan></tspan></text>
</text></g>
<path d="M675,1451 L675,1627 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#666666"/>
<path d="M707,1451 L707,1659 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#666666"/>
<path d="M723,1451 L723,1659 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#666666"/>
<path d="M563,363 L611,363 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M643,363 L739,363 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M595,411 L643,411 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M659,411 L739,411 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M583,371 C593,366 596,366 611,363 C596,360 593,360 583,355 C585,361 585,365 583,371 " fill="#000000" stroke="none"/>
<path d="M615,419 C625,414 628,414 643,411 C628,408 625,408 615,403 C617,409 617,413 615,419 " fill="#000000" stroke="none"/>
<path d="M687,419 C677,414 674,414 659,411 C674,408 677,408 687,403 C685,409 685,413 687,419 " fill="#000000" stroke="none"/>
<path d="M671,371 C661,366 658,366 643,363 C658,360 661,360 671,355 C669,361 669,365 671,371 " fill="#000000" stroke="none"/>
<path d="M735,1619 C725,1614 722,1614 707,1611 C722,1608 725,1608 735,1603 C733,1609 733,1613 735,1619 " fill="#000000" stroke="none"/>
<path d="M647,1619 C657,1614 660,1614 675,1611 C660,1608 657,1608 647,1603 C649,1609 649,1613 647,1619 " fill="#000000" stroke="none"/>
<path d="M679,1651 C689,1646 692,1646 707,1643 C692,1640 689,1640 679,1635 C681,1641 681,1645 679,1651 " fill="#000000" stroke="none"/>
<path d="M751,1651 C741,1646 738,1646 723,1643 C738,1640 741,1640 751,1635 C749,1641 749,1645 751,1651 " fill="#000000" stroke="none"/>
<path d="M643,1643 L707,1643 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M723,1643 L803,1643 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M707,1611 L803,1611 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M675,1611 L611,1611 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1667,1035 L1619,1035 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1587,1035 L1507,1035 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1559,1043 C1569,1038 1572,1038 1587,1035 C1572,1032 1569,1032 1559,1027 C1561,1033 1561,1037 1559,1043 " fill="#000000" stroke="none"/>
<path d="M1647,1043 C1637,1038 1634,1038 1619,1035 C1634,1032 1637,1032 1647,1027 C1645,1033 1645,1037 1647,1043 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 0 -0 0.7 827 1643)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.006<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="119" y="14">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 827 1611)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.0431<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="127" y="14">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 747 363)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.4223<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="137" y="14">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 747 411)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="0" y="14">0.070<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="117" y="14">µm</tspan></text>
</text></g>
<g transform="matrix( 0.7 0 -0 0.7 1499 1035)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-146" y="14">0.030<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-31" y="14">µm</tspan></text>
</text></g>
<path d="M1587,1179 L1507,1179 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1559,1187 C1569,1182 1572,1182 1587,1179 C1572,1176 1569,1176 1559,1171 C1561,1177 1561,1181 1559,1187 " fill="#000000" stroke="none"/>
<g transform="matrix( 0.7 -1.09102e-11 1.09102e-11 0.7 1499 1179)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-146" y="14">0.030<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-31" y="14">µm</tspan></text>
</text></g>
<path d="M1667,1179 L1619,1179 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1647,1187 C1637,1182 1634,1182 1619,1179 C1634,1176 1637,1176 1647,1171 C1645,1177 1645,1181 1647,1187 " fill="#000000" stroke="none"/>
<path d="M1555,1283 L1555,1227 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1587,1251 L1587,1227 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#999999"/>
<path d="M1527,1243 C1537,1238 1540,1238 1555,1235 C1540,1232 1537,1232 1527,1227 C1529,1233 1529,1237 1527,1243 " fill="#000000" stroke="none"/>
<path d="M1615,1243 C1605,1238 1602,1238 1587,1235 C1602,1232 1605,1232 1615,1227 C1613,1233 1613,1237 1615,1243 " fill="#000000" stroke="none"/>
<path d="M1667,1235 L1587,1235 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<path d="M1555,1235 L1507,1235 " fill="none" stroke-width="2" stroke-linejoin="bevel" stroke-linecap="round" stroke="#000000"/>
<g transform="matrix( 0.7 0 -0 0.7 1491 1235)" fill="#000000">
<text stroke="none" font-family="Times" font-size="40"><tspan x="-146" y="14">0.075<tspan dx="7"/></tspan><text stroke="none" font-family="Times" font-size="40"><tspan x="-33" y="14">µm</tspan></text>
</text></g>
</g>
</svg>

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img/openroad-gui.jpg Normal file

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View File

@ -0,0 +1,150 @@
<?xml version="1.0" encoding="UTF-8"?>
<svg xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink" width="1898pt" height="1059pt" viewBox="0 0 1898 1059" version="1.2">
<defs>
<clipPath id="clip1">
<path d="M 18.5 2.5 L 1898 2.5 L 1898 1059 L 18.5 1059 Z M 18.5 2.5 "/>
</clipPath>
<clipPath id="clip2">
<path d="M 343.5 112.5 L 1579.5 112.5 L 1579.5 551.5 L 343.5 551.5 Z M 343.5 112.5 "/>
</clipPath>
<image id="image304" width="32" height="32" xlink:href="data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAACAAAAAgCAAAAABWESUoAAAAAmJLR0QA/4ePzL8AAAApSURBVDiNY2Rg+M/AiAczMdAe/P+PH9PBDYyj4cDAwDAaDjAwGg4QAAAzhF/RgilCzQAAAABJRU5ErkJggg=="/>
<pattern id="pattern0" patternUnits="userSpaceOnUse" width="32" height="32" patternTransform="matrix(1,0,0,1,0.5,1079.5)">
<use xlink:href="#image304"/>
</pattern>
<mask id="mask0">
<rect x="0" y="0" width="1898" height="1059" style="fill:url(#pattern0);stroke:none;"/>
</mask>
<clipPath id="clip3">
<path d="M 434.5 885.5 L 481.5 885.5 L 481.5 931.5 L 434.5 931.5 Z M 434.5 885.5 "/>
</clipPath>
<pattern id="pattern1" patternUnits="userSpaceOnUse" width="32" height="32" patternTransform="matrix(1,0,0,1,0.5,1079.5)">
<use xlink:href="#image304"/>
</pattern>
<mask id="mask1">
<rect x="0" y="0" width="1898" height="1059" style="fill:url(#pattern1);stroke:none;"/>
</mask>
<clipPath id="clip4">
<path d="M 607.5 193.5 L 648.5 193.5 L 648.5 228.5 L 607.5 228.5 Z M 1365.5 193.5 L 1406.5 193.5 L 1406.5 228.5 L 1365.5 228.5 Z M 1247.5 193.5 L 1288.5 193.5 L 1288.5 228.5 L 1247.5 228.5 Z M 1129.5 193.5 L 1170.5 193.5 L 1170.5 228.5 L 1129.5 228.5 Z M 1012.5 193.5 L 1053.5 193.5 L 1053.5 228.5 L 1012.5 228.5 Z M 873.5 193.5 L 915.5 193.5 L 915.5 228.5 L 873.5 228.5 Z M 756.5 193.5 L 797.5 193.5 L 797.5 228.5 L 756.5 228.5 Z M 607.5 502.5 L 648.5 502.5 L 648.5 546.5 L 607.5 546.5 Z M 756.5 502.5 L 797.5 502.5 L 797.5 546.5 L 756.5 546.5 Z M 1012.5 502.5 L 1053.5 502.5 L 1053.5 546.5 L 1012.5 546.5 Z M 1129.5 502.5 L 1170.5 502.5 L 1170.5 546.5 L 1129.5 546.5 Z M 873.5 502.5 L 915.5 502.5 L 915.5 546.5 L 873.5 546.5 Z M 1365.5 502.5 L 1406.5 502.5 L 1406.5 546.5 L 1365.5 546.5 Z M 1247.5 502.5 L 1288.5 502.5 L 1288.5 546.5 L 1247.5 546.5 Z M 705.5 546.5 L 797.5 546.5 L 797.5 568.5 L 705.5 568.5 Z M 854.5 546.5 L 928.5 546.5 L 928.5 568.5 L 854.5 568.5 Z M 1012.5 546.5 L 1406.5 546.5 L 1406.5 568.5 L 1012.5 568.5 Z M 574.5 546.5 L 648.5 546.5 L 648.5 568.5 L 574.5 568.5 Z M 1012.5 568.5 L 1406.5 568.5 L 1406.5 614.5 L 1012.5 614.5 Z M 854.5 568.5 L 928.5 568.5 L 928.5 614.5 L 854.5 614.5 Z M 574.5 568.5 L 648.5 568.5 L 648.5 614.5 L 574.5 614.5 Z M 705.5 568.5 L 797.5 568.5 L 797.5 614.5 L 705.5 614.5 Z M 574.5 614.5 L 648.5 614.5 L 648.5 636.5 L 574.5 636.5 Z M 854.5 614.5 L 928.5 614.5 L 928.5 636.5 L 854.5 636.5 Z M 705.5 614.5 L 797.5 614.5 L 797.5 636.5 L 705.5 636.5 Z M 1012.5 614.5 L 1406.5 614.5 L 1406.5 636.5 L 1012.5 636.5 Z M 1012.5 636.5 L 1053.5 636.5 L 1053.5 666.5 L 1012.5 666.5 Z M 854.5 636.5 L 895.5 636.5 L 895.5 666.5 L 854.5 666.5 Z M 607.5 636.5 L 648.5 636.5 L 648.5 666.5 L 607.5 666.5 Z M 756.5 636.5 L 797.5 636.5 L 797.5 666.5 L 756.5 666.5 Z M 1365.5 636.5 L 1406.5 636.5 L 1406.5 666.5 L 1365.5 666.5 Z M 1129.5 636.5 L 1170.5 636.5 L 1170.5 666.5 L 1129.5 666.5 Z M 1247.5 636.5 L 1288.5 636.5 L 1288.5 666.5 L 1247.5 666.5 Z M 607.5 844.5 L 648.5 844.5 L 648.5 879.5 L 607.5 879.5 Z M 1365.5 844.5 L 1406.5 844.5 L 1406.5 879.5 L 1365.5 879.5 Z M 1247.5 844.5 L 1288.5 844.5 L 1288.5 879.5 L 1247.5 879.5 Z M 1129.5 844.5 L 1170.5 844.5 L 1170.5 879.5 L 1129.5 879.5 Z M 1012.5 844.5 L 1053.5 844.5 L 1053.5 879.5 L 1012.5 879.5 Z M 854.5 844.5 L 895.5 844.5 L 895.5 879.5 L 854.5 879.5 Z M 756.5 844.5 L 797.5 844.5 L 797.5 879.5 L 756.5 879.5 Z M 756.5 844.5 "/>
</clipPath>
<clipPath id="clip5">
<path d="M 1288.5 666.5 L 1365.5 666.5 L 1365.5 677.5 L 1288.5 677.5 Z M 523.5 666.5 L 607.5 666.5 L 607.5 688.5 L 523.5 688.5 Z M 1053.5 666.5 L 1129.5 666.5 L 1129.5 699.5 L 1053.5 699.5 Z M 1288.5 677.5 L 1365.5 677.5 L 1365.5 723.5 L 1288.5 723.5 Z M 523.5 688.5 L 607.5 688.5 L 607.5 734.5 L 523.5 734.5 Z M 1053.5 699.5 L 1129.5 699.5 L 1129.5 745.5 L 1053.5 745.5 Z M 1288.5 723.5 L 1365.5 723.5 L 1365.5 770.5 L 1288.5 770.5 Z M 523.5 734.5 L 607.5 734.5 L 607.5 781.5 L 523.5 781.5 Z M 895.5 666.5 L 1012.5 666.5 L 1012.5 786.5 L 895.5 786.5 Z M 1406.5 666.5 L 1484.5 666.5 L 1484.5 786.5 L 1406.5 786.5 Z M 1170.5 666.5 L 1247.5 666.5 L 1247.5 786.5 L 1170.5 786.5 Z M 1288.5 770.5 L 1365.5 770.5 L 1365.5 816.5 L 1288.5 816.5 Z M 523.5 781.5 L 607.5 781.5 L 607.5 827.5 L 523.5 827.5 Z M 1170.5 786.5 L 1247.5 786.5 L 1247.5 833.5 L 1170.5 833.5 Z M 895.5 786.5 L 1012.5 786.5 L 1012.5 833.5 L 895.5 833.5 Z M 1406.5 786.5 L 1484.5 786.5 L 1484.5 833.5 L 1406.5 833.5 Z M 1406.5 833.5 L 1484.5 833.5 L 1484.5 844.5 L 1406.5 844.5 Z M 523.5 827.5 L 607.5 827.5 L 607.5 844.5 L 523.5 844.5 Z M 1170.5 833.5 L 1247.5 833.5 L 1247.5 844.5 L 1170.5 844.5 Z M 1053.5 745.5 L 1129.5 745.5 L 1129.5 844.5 L 1053.5 844.5 Z M 797.5 666.5 L 854.5 666.5 L 854.5 844.5 L 797.5 844.5 Z M 895.5 833.5 L 1012.5 833.5 L 1012.5 844.5 L 895.5 844.5 Z M 1288.5 816.5 L 1365.5 816.5 L 1365.5 844.5 L 1288.5 844.5 Z M 648.5 666.5 L 756.5 666.5 L 756.5 844.5 L 648.5 844.5 Z M 648.5 666.5 "/>
</clipPath>
<clipPath id="clip6">
<path d="M 1170.5 228.5 L 1247.5 228.5 L 1247.5 239.5 L 1170.5 239.5 Z M 1406.5 228.5 L 1484.5 228.5 L 1484.5 239.5 L 1406.5 239.5 Z M 915.5 228.5 L 1012.5 228.5 L 1012.5 239.5 L 915.5 239.5 Z M 648.5 228.5 L 756.5 228.5 L 756.5 239.5 L 648.5 239.5 Z M 1053.5 228.5 L 1129.5 228.5 L 1129.5 256.5 L 1053.5 256.5 Z M 797.5 228.5 L 873.5 228.5 L 873.5 256.5 L 797.5 256.5 Z M 523.5 228.5 L 607.5 228.5 L 607.5 256.5 L 523.5 256.5 Z M 1288.5 228.5 L 1365.5 228.5 L 1365.5 256.5 L 1288.5 256.5 Z M 648.5 239.5 L 756.5 239.5 L 756.5 286.5 L 648.5 286.5 Z M 1170.5 239.5 L 1247.5 239.5 L 1247.5 286.5 L 1170.5 286.5 Z M 1406.5 239.5 L 1484.5 239.5 L 1484.5 286.5 L 1406.5 286.5 Z M 915.5 239.5 L 1012.5 239.5 L 1012.5 286.5 L 915.5 286.5 Z M 797.5 256.5 L 873.5 256.5 L 873.5 302.5 L 797.5 302.5 Z M 1053.5 256.5 L 1129.5 256.5 L 1129.5 302.5 L 1053.5 302.5 Z M 523.5 256.5 L 607.5 256.5 L 607.5 302.5 L 523.5 302.5 Z M 1288.5 256.5 L 1365.5 256.5 L 1365.5 302.5 L 1288.5 302.5 Z M 648.5 286.5 L 756.5 286.5 L 756.5 332.5 L 648.5 332.5 Z M 915.5 286.5 L 1012.5 286.5 L 1012.5 332.5 L 915.5 332.5 Z M 1170.5 286.5 L 1247.5 286.5 L 1247.5 332.5 L 1170.5 332.5 Z M 1406.5 286.5 L 1484.5 286.5 L 1484.5 332.5 L 1406.5 332.5 Z M 1053.5 302.5 L 1129.5 302.5 L 1129.5 349.5 L 1053.5 349.5 Z M 523.5 302.5 L 607.5 302.5 L 607.5 349.5 L 523.5 349.5 Z M 797.5 302.5 L 873.5 302.5 L 873.5 349.5 L 797.5 349.5 Z M 1288.5 302.5 L 1365.5 302.5 L 1365.5 349.5 L 1288.5 349.5 Z M 1170.5 332.5 L 1247.5 332.5 L 1247.5 379.5 L 1170.5 379.5 Z M 1406.5 332.5 L 1484.5 332.5 L 1484.5 379.5 L 1406.5 379.5 Z M 915.5 332.5 L 1012.5 332.5 L 1012.5 379.5 L 915.5 379.5 Z M 648.5 332.5 L 756.5 332.5 L 756.5 379.5 L 648.5 379.5 Z M 1053.5 349.5 L 1129.5 349.5 L 1129.5 395.5 L 1053.5 395.5 Z M 523.5 349.5 L 607.5 349.5 L 607.5 395.5 L 523.5 395.5 Z M 1288.5 349.5 L 1365.5 349.5 L 1365.5 395.5 L 1288.5 395.5 Z M 797.5 349.5 L 873.5 349.5 L 873.5 395.5 L 797.5 395.5 Z M 1288.5 395.5 L 1365.5 395.5 L 1365.5 442.5 L 1288.5 442.5 Z M 1288.5 442.5 L 1365.5 442.5 L 1365.5 488.5 L 1288.5 488.5 Z M 1406.5 379.5 L 1484.5 379.5 L 1484.5 502.5 L 1406.5 502.5 Z M 1053.5 395.5 L 1129.5 395.5 L 1129.5 502.5 L 1053.5 502.5 Z M 1170.5 379.5 L 1247.5 379.5 L 1247.5 502.5 L 1170.5 502.5 Z M 648.5 379.5 L 756.5 379.5 L 756.5 502.5 L 648.5 502.5 Z M 1288.5 488.5 L 1365.5 488.5 L 1365.5 502.5 L 1288.5 502.5 Z M 797.5 395.5 L 873.5 395.5 L 873.5 502.5 L 797.5 502.5 Z M 523.5 395.5 L 607.5 395.5 L 607.5 502.5 L 523.5 502.5 Z M 915.5 379.5 L 1012.5 379.5 L 1012.5 502.5 L 915.5 502.5 Z M 915.5 379.5 "/>
</clipPath>
<clipPath id="clip7">
<path d="M 1365.5 666.5 L 1406.5 666.5 L 1406.5 844.5 L 1365.5 844.5 Z M 607.5 666.5 L 648.5 666.5 L 648.5 844.5 L 607.5 844.5 Z M 756.5 666.5 L 797.5 666.5 L 797.5 844.5 L 756.5 844.5 Z M 854.5 666.5 L 895.5 666.5 L 895.5 844.5 L 854.5 844.5 Z M 1012.5 666.5 L 1053.5 666.5 L 1053.5 844.5 L 1012.5 844.5 Z M 1129.5 666.5 L 1170.5 666.5 L 1170.5 844.5 L 1129.5 844.5 Z M 1247.5 666.5 L 1288.5 666.5 L 1288.5 844.5 L 1247.5 844.5 Z M 1247.5 666.5 "/>
</clipPath>
<image id="image305" width="32" height="32" xlink:href="data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAACAAAAAgCAAAAABWESUoAAAAAmJLR0QA/4ePzL8AAAAtSURBVDiNY/jPwMDAwMDwHxeNWwZK49E7eFQwwnzDiINmGA0HhtFwGA0HdBoAtQDvIRl1O+YAAAAASUVORK5CYII="/>
<pattern id="pattern2" patternUnits="userSpaceOnUse" width="32" height="32" patternTransform="matrix(1,0,0,1,0.5,1079.5)">
<use xlink:href="#image305"/>
</pattern>
<mask id="mask2">
<rect x="0" y="0" width="1898" height="1059" style="fill:url(#pattern2);stroke:none;"/>
</mask>
<clipPath id="clip8">
<path d="M 1365.5 228.5 L 1406.5 228.5 L 1406.5 502.5 L 1365.5 502.5 Z M 607.5 228.5 L 648.5 228.5 L 648.5 502.5 L 607.5 502.5 Z M 756.5 228.5 L 797.5 228.5 L 797.5 502.5 L 756.5 502.5 Z M 873.5 228.5 L 915.5 228.5 L 915.5 502.5 L 873.5 502.5 Z M 1012.5 228.5 L 1053.5 228.5 L 1053.5 502.5 L 1012.5 502.5 Z M 1129.5 228.5 L 1170.5 228.5 L 1170.5 502.5 L 1129.5 502.5 Z M 1247.5 228.5 L 1288.5 228.5 L 1288.5 502.5 L 1247.5 502.5 Z M 1247.5 228.5 "/>
</clipPath>
<image id="image306" width="32" height="32" xlink:href="data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAACAAAAAgCAAAAABWESUoAAAAAmJLR0QA/4ePzL8AAAAtSURBVDiNY/jPwMDAwMDwHxfNCKUZGHHQBPQPEZphNBxgHsSvbjQcIPQICQcAbQzvIWHO67YAAAAASUVORK5CYII="/>
<pattern id="pattern3" patternUnits="userSpaceOnUse" width="32" height="32" patternTransform="matrix(1,0,0,1,0.5,1079.5)">
<use xlink:href="#image306"/>
</pattern>
<mask id="mask3">
<rect x="0" y="0" width="1898" height="1059" style="fill:url(#pattern3);stroke:none;"/>
</mask>
<clipPath id="clip9">
<path d="M 395.5 141.5 L 1527.5 141.5 L 1527.5 187.5 L 395.5 187.5 Z M 640.5 187.5 L 763.5 187.5 L 763.5 239.5 L 640.5 239.5 Z M 917.5 187.5 L 1008.5 187.5 L 1008.5 239.5 L 917.5 239.5 Z M 1399.5 187.5 L 1489.5 187.5 L 1489.5 239.5 L 1399.5 239.5 Z M 1163.5 187.5 L 1254.5 187.5 L 1254.5 239.5 L 1163.5 239.5 Z M 1065.5 234.5 L 1117.5 234.5 L 1117.5 256.5 L 1065.5 256.5 Z M 811.5 234.5 L 860.5 234.5 L 860.5 256.5 L 811.5 256.5 Z M 544.5 234.5 L 593.5 234.5 L 593.5 256.5 L 544.5 256.5 Z M 1300.5 234.5 L 1352.5 234.5 L 1352.5 256.5 L 1300.5 256.5 Z M 1399.5 239.5 L 1489.5 239.5 L 1489.5 286.5 L 1399.5 286.5 Z M 640.5 239.5 L 763.5 239.5 L 763.5 286.5 L 640.5 286.5 Z M 1163.5 239.5 L 1254.5 239.5 L 1254.5 286.5 L 1163.5 286.5 Z M 917.5 239.5 L 1008.5 239.5 L 1008.5 286.5 L 917.5 286.5 Z M 1300.5 256.5 L 1352.5 256.5 L 1352.5 302.5 L 1300.5 302.5 Z M 544.5 256.5 L 593.5 256.5 L 593.5 302.5 L 544.5 302.5 Z M 1065.5 256.5 L 1117.5 256.5 L 1117.5 302.5 L 1065.5 302.5 Z M 811.5 256.5 L 860.5 256.5 L 860.5 302.5 L 811.5 302.5 Z M 640.5 286.5 L 763.5 286.5 L 763.5 332.5 L 640.5 332.5 Z M 1399.5 286.5 L 1489.5 286.5 L 1489.5 332.5 L 1399.5 332.5 Z M 1163.5 286.5 L 1254.5 286.5 L 1254.5 332.5 L 1163.5 332.5 Z M 917.5 286.5 L 1008.5 286.5 L 1008.5 332.5 L 917.5 332.5 Z M 544.5 302.5 L 593.5 302.5 L 593.5 349.5 L 544.5 349.5 Z M 811.5 302.5 L 860.5 302.5 L 860.5 349.5 L 811.5 349.5 Z M 1065.5 302.5 L 1117.5 302.5 L 1117.5 349.5 L 1065.5 349.5 Z M 1300.5 302.5 L 1352.5 302.5 L 1352.5 349.5 L 1300.5 349.5 Z M 1399.5 332.5 L 1489.5 332.5 L 1489.5 379.5 L 1399.5 379.5 Z M 640.5 332.5 L 763.5 332.5 L 763.5 379.5 L 640.5 379.5 Z M 917.5 332.5 L 1008.5 332.5 L 1008.5 379.5 L 917.5 379.5 Z M 1163.5 332.5 L 1254.5 332.5 L 1254.5 379.5 L 1163.5 379.5 Z M 1300.5 349.5 L 1352.5 349.5 L 1352.5 395.5 L 1300.5 395.5 Z M 811.5 349.5 L 860.5 349.5 L 860.5 395.5 L 811.5 395.5 Z M 544.5 349.5 L 593.5 349.5 L 593.5 395.5 L 544.5 395.5 Z M 1065.5 349.5 L 1117.5 349.5 L 1117.5 395.5 L 1065.5 395.5 Z M 1300.5 395.5 L 1352.5 395.5 L 1352.5 425.5 L 1300.5 425.5 Z M 1065.5 395.5 L 1117.5 395.5 L 1117.5 427.5 L 1065.5 427.5 Z M 1300.5 425.5 L 1504.5 425.5 L 1504.5 427.5 L 1300.5 427.5 Z M 544.5 395.5 L 593.5 395.5 L 593.5 429.5 L 544.5 429.5 Z M 811.5 395.5 L 860.5 395.5 L 860.5 429.5 L 811.5 429.5 Z M 1065.5 427.5 L 1504.5 427.5 L 1504.5 442.5 L 1065.5 442.5 Z M 544.5 429.5 L 1018.5 429.5 L 1018.5 476.5 L 544.5 476.5 Z M 1065.5 442.5 L 1504.5 442.5 L 1504.5 488.5 L 1065.5 488.5 Z M 961.5 476.5 L 1018.5 476.5 L 1018.5 537.5 L 961.5 537.5 Z M 426.5 269.5 L 495.5 269.5 L 495.5 542.5 L 426.5 542.5 Z M 686.5 542.5 L 765.5 542.5 L 765.5 568.5 L 686.5 568.5 Z M 961.5 537.5 L 1381.5 537.5 L 1381.5 568.5 L 961.5 568.5 Z M 426.5 542.5 L 634.5 542.5 L 634.5 568.5 L 426.5 568.5 Z M 812.5 546.5 L 915.5 546.5 L 915.5 568.5 L 812.5 568.5 Z M 812.5 568.5 L 915.5 568.5 L 915.5 614.5 L 812.5 614.5 Z M 426.5 568.5 L 634.5 568.5 L 634.5 614.5 L 426.5 614.5 Z M 686.5 568.5 L 765.5 568.5 L 765.5 614.5 L 686.5 614.5 Z M 961.5 568.5 L 1381.5 568.5 L 1381.5 614.5 L 961.5 614.5 Z M 961.5 614.5 L 1381.5 614.5 L 1381.5 629.5 L 961.5 629.5 Z M 426.5 614.5 L 634.5 614.5 L 634.5 636.5 L 426.5 636.5 Z M 812.5 614.5 L 915.5 614.5 L 915.5 636.5 L 812.5 636.5 Z M 1427.5 488.5 L 1504.5 488.5 L 1504.5 677.5 L 1427.5 677.5 Z M 961.5 629.5 L 1018.5 629.5 L 1018.5 688.5 L 961.5 688.5 Z M 1065.5 677.5 L 1504.5 677.5 L 1504.5 699.5 L 1065.5 699.5 Z M 686.5 614.5 L 765.5 614.5 L 765.5 704.5 L 686.5 704.5 Z M 522.5 688.5 L 614.5 688.5 L 614.5 734.5 L 522.5 734.5 Z M 815.5 688.5 L 1018.5 688.5 L 1018.5 740.5 L 815.5 740.5 Z M 1065.5 699.5 L 1504.5 699.5 L 1504.5 740.5 L 1065.5 740.5 Z M 1065.5 740.5 L 1117.5 740.5 L 1117.5 745.5 L 1065.5 745.5 Z M 522.5 734.5 L 614.5 734.5 L 614.5 754.5 L 522.5 754.5 Z M 815.5 740.5 L 867.5 740.5 L 867.5 754.5 L 815.5 754.5 Z M 1065.5 745.5 L 1117.5 745.5 L 1117.5 767.5 L 1065.5 767.5 Z M 1300.5 740.5 L 1352.5 740.5 L 1352.5 770.5 L 1300.5 770.5 Z M 522.5 754.5 L 867.5 754.5 L 867.5 781.5 L 522.5 781.5 Z M 522.5 781.5 L 867.5 781.5 L 867.5 806.5 L 522.5 806.5 Z M 1300.5 770.5 L 1352.5 770.5 L 1352.5 816.5 L 1300.5 816.5 Z M 522.5 806.5 L 614.5 806.5 L 614.5 827.5 L 522.5 827.5 Z M 1399.5 786.5 L 1489.5 786.5 L 1489.5 833.5 L 1399.5 833.5 Z M 916.5 786.5 L 1006.5 786.5 L 1006.5 833.5 L 916.5 833.5 Z M 1163.5 786.5 L 1254.5 786.5 L 1254.5 833.5 L 1163.5 833.5 Z M 1300.5 816.5 L 1352.5 816.5 L 1352.5 838.5 L 1300.5 838.5 Z M 522.5 827.5 L 614.5 827.5 L 614.5 838.5 L 522.5 838.5 Z M 916.5 833.5 L 1006.5 833.5 L 1006.5 885.5 L 916.5 885.5 Z M 1163.5 833.5 L 1254.5 833.5 L 1254.5 885.5 L 1163.5 885.5 Z M 1399.5 833.5 L 1489.5 833.5 L 1489.5 885.5 L 1399.5 885.5 Z M 395.5 885.5 L 1527.5 885.5 L 1527.5 931.5 L 395.5 931.5 Z M 395.5 885.5 "/>
</clipPath>
<clipPath id="clip10">
<path d="M 395.5 98.5 L 1527.5 98.5 L 1527.5 141.5 L 395.5 141.5 Z M 395.5 141.5 L 1527.5 141.5 L 1527.5 187.5 L 395.5 187.5 Z M 395.5 187.5 L 1527.5 187.5 L 1527.5 230.5 L 395.5 230.5 Z M 395.5 842.5 L 1527.5 842.5 L 1527.5 885.5 L 395.5 885.5 Z M 395.5 885.5 L 1527.5 885.5 L 1527.5 931.5 L 395.5 931.5 Z M 395.5 931.5 L 1527.5 931.5 L 1527.5 974.5 L 395.5 974.5 Z M 395.5 931.5 "/>
</clipPath>
<clipPath id="clip11">
<path d="M 434.5 141.5 L 481.5 141.5 L 481.5 187.5 L 434.5 187.5 Z M 1441.5 141.5 L 1488.5 141.5 L 1488.5 187.5 L 1441.5 187.5 Z M 1315.5 141.5 L 1362.5 141.5 L 1362.5 187.5 L 1315.5 187.5 Z M 1189.5 141.5 L 1236.5 141.5 L 1236.5 187.5 L 1189.5 187.5 Z M 1064.5 141.5 L 1110.5 141.5 L 1110.5 187.5 L 1064.5 187.5 Z M 938.5 141.5 L 984.5 141.5 L 984.5 187.5 L 938.5 187.5 Z M 812.5 141.5 L 858.5 141.5 L 858.5 187.5 L 812.5 187.5 Z M 686.5 141.5 L 733.5 141.5 L 733.5 187.5 L 686.5 187.5 Z M 560.5 141.5 L 607.5 141.5 L 607.5 187.5 L 560.5 187.5 Z M 434.5 885.5 L 481.5 885.5 L 481.5 931.5 L 434.5 931.5 Z M 1441.5 885.5 L 1488.5 885.5 L 1488.5 931.5 L 1441.5 931.5 Z M 1315.5 885.5 L 1362.5 885.5 L 1362.5 931.5 L 1315.5 931.5 Z M 1189.5 885.5 L 1236.5 885.5 L 1236.5 931.5 L 1189.5 931.5 Z M 1064.5 885.5 L 1110.5 885.5 L 1110.5 931.5 L 1064.5 931.5 Z M 938.5 885.5 L 984.5 885.5 L 984.5 931.5 L 938.5 931.5 Z M 812.5 885.5 L 858.5 885.5 L 858.5 931.5 L 812.5 931.5 Z M 686.5 885.5 L 733.5 885.5 L 733.5 931.5 L 686.5 931.5 Z M 560.5 885.5 L 607.5 885.5 L 607.5 931.5 L 560.5 931.5 Z M 560.5 885.5 "/>
</clipPath>
<image id="image307" width="32" height="32" xlink:href="data:image/png;base64,iVBORw0KGgoAAAANSUhEUgAAACAAAAAgCAAAAABWESUoAAAAAmJLR0QA/4ePzL8AAAA9SURBVDiN7ZAhEgAgDMNS/v/nIsAgtnpuMzG7axsIJ9xTYEDUBJ/nkqGDQ48FulEFQ36uMR7o94+Hl3942JrBc/FcUmODAAAAAElFTkSuQmCC"/>
<pattern id="pattern4" patternUnits="userSpaceOnUse" width="32" height="32" patternTransform="matrix(1,0,0,1,0.5,1079.5)">
<use xlink:href="#image307"/>
</pattern>
<mask id="mask4">
<rect x="0" y="0" width="1898" height="1059" style="fill:url(#pattern4);stroke:none;"/>
</mask>
</defs>
<g id="surface301">
<g clip-path="url(#clip1)" clip-rule="nonzero">
</g>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,87.058824%,0%);stroke-opacity:0.496063;stroke-miterlimit:10;" d="M 343 967 L 1579 967 M 343 528 L 1579 528 M 343 528 L 343 967 M 1579 528 L 1579 967 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<g clip-path="url(#clip2)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(0%,87.058824%,0%);fill-opacity:0.496063;stroke:none;" mask="url(#mask0)"/>
</g>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(78.431374%,45.490199%,10.196079%);stroke-opacity:0.496063;stroke-miterlimit:10;" d="M 434 194 L 481 194 M 434 148 L 481 148 M 434 148 L 434 194 M 481 148 L 481 194 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<g clip-path="url(#clip3)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(78.431374%,45.490199%,10.196079%);fill-opacity:0.496063;stroke:none;" mask="url(#mask1)"/>
</g>
<g clip-path="url(#clip4)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(92.54902%,0%,0%);fill-opacity:0.944882;stroke:none;"/>
</g>
<g clip-path="url(#clip5)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(0%,87.058824%,0%);fill-opacity:0.944882;stroke:none;"/>
</g>
<g clip-path="url(#clip6)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(78.431374%,45.490199%,10.196079%);fill-opacity:0.944882;stroke:none;"/>
</g>
<g clip-path="url(#clip7)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(52.549022%,22.745104%,0%);fill-opacity:0.944882;stroke:none;"/>
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(0%,87.058824%,0%);fill-opacity:0.944882;stroke:none;" mask="url(#mask2)"/>
</g>
<g clip-path="url(#clip8)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(64.313728%,0%,0%);fill-opacity:0.944882;stroke:none;"/>
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(78.431374%,45.490199%,10.196079%);fill-opacity:0.944882;stroke:none;" mask="url(#mask3)"/>
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(100%,100%,0%);fill-opacity:0.15748;stroke:none;"/>
</g>
<g clip-path="url(#clip9)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(18.039216%,50.196081%,100%);fill-opacity:0.629921;stroke:none;"/>
</g>
<g clip-path="url(#clip10)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(69.01961%,40.000004%,94.117647%);fill-opacity:0.629921;stroke:none;"/>
</g>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,37.647063%,100%);stroke-opacity:0.944882;stroke-miterlimit:10;" d="M 434 938 L 481 938 M 434 892 L 481 892 M 434 892 L 434 938 M 481 892 L 481 938 M 560 938 L 607 938 M 560 892 L 607 892 M 560 892 L 560 938 M 607 892 L 607 938 M 686 938 L 733 938 M 686 892 L 733 892 M 686 892 L 686 938 M 733 892 L 733 938 M 812 938 L 858 938 M 812 892 L 858 892 M 812 892 L 812 938 M 858 892 L 858 938 M 938 938 L 984 938 M 938 892 L 984 892 M 938 892 L 938 938 M 984 892 L 984 938 M 1064 938 L 1110 938 M 1064 892 L 1110 892 M 1064 892 L 1064 938 M 1110 892 L 1110 938 M 1189 938 L 1236 938 M 1189 892 L 1236 892 M 1189 892 L 1189 938 M 1236 892 L 1236 938 M 1315 938 L 1362 938 M 1315 892 L 1362 892 M 1315 892 L 1315 938 M 1362 892 L 1362 938 M 1441 938 L 1488 938 M 1441 892 L 1488 892 M 1441 892 L 1441 938 M 1488 892 L 1488 938 M 434 194 L 481 194 M 434 148 L 481 148 M 434 148 L 434 194 M 481 148 L 481 194 M 560 194 L 607 194 M 560 148 L 607 148 M 560 148 L 560 194 M 607 148 L 607 194 M 686 194 L 733 194 M 686 148 L 733 148 M 686 148 L 686 194 M 733 148 L 733 194 M 812 194 L 858 194 M 812 148 L 858 148 M 812 148 L 812 194 M 858 148 L 858 194 M 938 194 L 984 194 M 938 148 L 984 148 M 938 148 L 938 194 M 984 148 L 984 194 M 1064 194 L 1110 194 M 1064 148 L 1110 148 M 1064 148 L 1064 194 M 1110 148 L 1110 194 M 1189 194 L 1236 194 M 1189 148 L 1236 148 M 1189 148 L 1189 194 M 1236 148 L 1236 194 M 1315 194 L 1362 194 M 1315 148 L 1362 148 M 1315 148 L 1315 194 M 1362 148 L 1362 194 M 1441 194 L 1488 194 M 1441 148 L 1488 148 M 1441 148 L 1441 194 M 1488 148 L 1488 194 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<g clip-path="url(#clip11)" clip-rule="nonzero">
<rect x="0" y="0" width="1898" height="1059" style="fill:rgb(0%,37.647063%,100%);fill-opacity:0.944882;stroke:none;" mask="url(#mask4)"/>
</g>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,0%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 545 823 L 592 823 M 545 777 L 592 777 M 545 777 L 545 823 M 592 777 L 592 823 M 545 730 L 592 730 M 545 684 L 592 684 M 545 684 L 545 730 M 592 684 L 592 730 M 681 840 L 727 840 M 681 793 L 727 793 M 681 793 L 681 840 M 727 793 L 727 840 M 681 747 L 727 747 M 681 700 L 727 700 M 681 700 L 681 747 M 727 700 L 727 747 M 812 823 L 858 823 M 812 777 L 858 777 M 812 777 L 812 823 M 858 777 L 858 823 M 812 730 L 858 730 M 812 684 L 858 684 M 812 684 L 812 730 M 858 684 L 858 730 M 939 840 L 986 840 M 939 793 L 986 793 M 939 793 L 939 840 M 986 793 L 986 840 M 939 747 L 986 747 M 939 700 L 986 700 M 939 700 L 939 747 M 986 700 L 986 747 M 1068 823 L 1114 823 M 1068 777 L 1114 777 M 1068 777 L 1068 823 M 1114 777 L 1114 823 M 1068 730 L 1114 730 M 1068 684 L 1114 684 M 1068 684 L 1068 730 M 1114 684 L 1114 730 M 1185 840 L 1232 840 M 1185 793 L 1232 793 M 1185 793 L 1185 840 M 1232 793 L 1232 840 M 1185 747 L 1232 747 M 1185 700 L 1232 700 M 1185 700 L 1185 747 M 1232 700 L 1232 747 M 1303 823 L 1349 823 M 1303 777 L 1349 777 M 1303 777 L 1303 823 M 1349 777 L 1349 823 M 1303 730 L 1349 730 M 1303 684 L 1349 684 M 1303 684 L 1303 730 M 1349 684 L 1349 730 M 1303 637 L 1349 637 M 1303 591 L 1349 591 M 1303 591 L 1303 637 M 1349 591 L 1349 637 M 1421 840 L 1467 840 M 1421 793 L 1467 793 M 1421 793 L 1421 840 M 1467 793 L 1467 840 M 1421 747 L 1467 747 M 1421 700 L 1467 700 M 1421 700 L 1421 747 M 1467 700 L 1467 747 M 588 511 L 634 511 M 588 465 L 634 465 M 588 465 L 588 511 M 634 465 L 634 511 M 719 511 L 765 511 M 719 465 L 765 465 M 719 465 L 719 511 M 765 465 L 765 511 M 868 511 L 915 511 M 868 465 L 915 465 M 868 465 L 868 511 M 915 465 L 915 511 M 1034 511 L 1080 511 M 1034 465 L 1080 465 M 1034 465 L 1034 511 M 1080 465 L 1080 511 M 1127 511 L 1173 511 M 1127 465 L 1173 465 M 1127 465 L 1127 511 M 1173 465 L 1173 511 M 1220 511 L 1266 511 M 1220 465 L 1266 465 M 1220 465 L 1220 511 M 1266 465 L 1266 511 M 1313 511 L 1359 511 M 1313 465 L 1359 465 M 1313 465 L 1313 511 M 1359 465 L 1359 511 M 545 391 L 592 391 M 545 345 L 592 345 M 545 345 L 545 391 M 592 345 L 592 391 M 545 298 L 592 298 M 545 252 L 592 252 M 545 252 L 545 298 M 592 252 L 592 298 M 938 293 L 984 293 M 938 246 L 984 246 M 938 246 L 938 293 M 984 246 L 984 293 M 1068 380 L 1114 380 M 1068 334 L 1114 334 M 1068 334 L 1068 380 M 1114 334 L 1114 380 M 1185 293 L 1232 293 M 1185 246 L 1232 246 M 1185 246 L 1185 293 M 1232 246 L 1232 293 M 1303 402 L 1349 402 M 1303 356 L 1349 356 M 1303 356 L 1303 402 M 1349 356 L 1349 402 M 1303 309 L 1349 309 M 1303 263 L 1349 263 M 1303 263 L 1303 309 M 1349 263 L 1349 309 M 1421 293 L 1467 293 M 1421 246 L 1467 246 M 1421 246 L 1421 293 M 1467 246 L 1467 293 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,0%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 545 777 L 592 823 M 545 823 L 592 777 M 545 684 L 592 730 M 545 730 L 592 684 M 681 793 L 727 840 M 681 840 L 727 793 M 681 700 L 727 747 M 681 747 L 727 700 M 812 777 L 858 823 M 812 823 L 858 777 M 812 684 L 858 730 M 812 730 L 858 684 M 939 793 L 986 840 M 939 840 L 986 793 M 939 700 L 986 747 M 939 747 L 986 700 M 1068 777 L 1114 823 M 1068 823 L 1114 777 M 1068 684 L 1114 730 M 1068 730 L 1114 684 M 1185 793 L 1232 840 M 1185 840 L 1232 793 M 1185 700 L 1232 747 M 1185 747 L 1232 700 M 1303 777 L 1349 823 M 1303 823 L 1349 777 M 1303 684 L 1349 730 M 1303 730 L 1349 684 M 1303 591 L 1349 637 M 1303 637 L 1349 591 M 1421 793 L 1467 840 M 1421 840 L 1467 793 M 1421 700 L 1467 747 M 1421 747 L 1467 700 M 588 465 L 634 511 M 588 511 L 634 465 M 719 465 L 765 511 M 719 511 L 765 465 M 868 465 L 915 511 M 868 511 L 915 465 M 1034 465 L 1080 511 M 1034 511 L 1080 465 M 1127 465 L 1173 511 M 1127 511 L 1173 465 M 1220 465 L 1266 511 M 1220 511 L 1266 465 M 1313 465 L 1359 511 M 1313 511 L 1359 465 M 545 345 L 592 391 M 545 391 L 592 345 M 545 252 L 592 298 M 545 298 L 592 252 M 938 246 L 984 293 M 938 293 L 984 246 M 1068 334 L 1114 380 M 1068 380 L 1114 334 M 1185 246 L 1232 293 M 1185 293 L 1232 246 M 1303 356 L 1349 402 M 1303 402 L 1349 356 M 1303 263 L 1349 309 M 1303 309 L 1349 263 M 1421 246 L 1467 293 M 1421 293 L 1467 246 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 597.058594 594.683594 L 574.199219 594.683594 L 567.9375 612.5 L 559.882812 612.5 L 581.03125 553.199219 L 590.792969 553.199219 L 611.621094 612.5 L 603.160156 612.5 Z M 594.941406 588.339844 L 585.832031 561.332031 L 576.070312 588.339844 Z M 594.941406 588.339844 "/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,60.392159%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 560 520 L 607 520 M 560 473 L 607 473 M 560 473 L 560 520 M 607 473 L 607 520 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(19.607843%,89.411765%,88.235295%);stroke-opacity:1;stroke-miterlimit:10;" d="M 560 520 L 607 520 M 560 473 L 607 473 M 607 520 L 607 473 M 560 520 L 560 473 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 736.179688 595.578125 L 736.015625 598.183594 L 735.609375 600.542969 L 734.878906 602.738281 L 733.902344 604.691406 L 732.597656 606.5625 L 731.054688 608.1875 L 729.347656 609.570312 L 727.554688 610.628906 L 725.523438 611.441406 L 723.40625 612.09375 L 721.128906 612.417969 L 718.6875 612.5 L 691.925781 612.5 L 691.925781 553.199219 L 716.003906 553.199219 L 719.503906 553.441406 L 722.59375 554.011719 L 725.359375 554.988281 L 727.71875 556.371094 L 729.753906 558.160156 L 731.378906 560.355469 L 732.03125 561.578125 L 732.597656 562.878906 L 733.007812 564.097656 L 733.332031 565.480469 L 733.496094 566.863281 L 733.574219 568.246094 L 733.332031 571.175781 L 732.597656 573.699219 L 731.460938 576.058594 L 729.832031 578.007812 L 727.800781 579.796875 L 725.359375 581.179688 L 727.71875 582.238281 L 729.753906 583.378906 L 731.542969 584.679688 L 733.007812 586.144531 L 734.144531 587.6875 L 735.039062 589.316406 L 735.367188 590.292969 L 735.851562 592.246094 L 736.015625 593.382812 L 736.097656 594.441406 Z M 726.011719 569.304688 L 725.765625 566.863281 L 725.035156 564.832031 L 723.894531 563.042969 L 722.269531 561.738281 L 720.234375 560.765625 L 717.714844 560.113281 L 717.144531 560.113281 L 716.003906 559.949219 L 714.703125 559.949219 L 714.132812 559.867188 L 699.492188 559.867188 L 699.492188 578.742188 L 714.132812 578.742188 L 717.144531 578.578125 L 719.746094 578.089844 L 721.941406 577.195312 L 723.570312 575.976562 L 724.871094 574.347656 L 725.683594 572.394531 L 725.765625 571.988281 L 725.929688 571.011719 L 725.929688 569.875 Z M 717.957031 605.828125 L 720.234375 605.75 L 722.269531 605.261719 L 724.058594 604.445312 L 725.523438 603.390625 L 726.742188 602.007812 L 727.71875 600.296875 L 727.960938 599.648438 L 728.125 598.914062 L 728.371094 598.101562 L 728.449219 597.371094 L 728.53125 596.554688 L 728.613281 595.660156 L 728.449219 593.871094 L 728.125 592.164062 L 727.554688 590.699219 L 726.742188 589.316406 L 725.683594 588.175781 L 724.464844 587.121094 L 723.570312 586.632812 L 722.59375 586.226562 L 721.535156 585.898438 L 720.398438 585.65625 L 719.175781 585.492188 L 717.957031 585.410156 L 699.492188 585.410156 L 699.492188 605.828125 Z M 717.957031 605.828125 "/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,60.392159%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 686 520 L 733 520 M 686 473 L 733 473 M 686 473 L 686 520 M 733 473 L 733 520 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(19.607843%,89.411765%,88.235295%);stroke-opacity:1;stroke-miterlimit:10;" d="M 686 520 L 733 520 M 686 473 L 733 473 M 733 520 L 733 473 M 686 520 L 686 473 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 813.40625 582.667969 L 813.484375 579.414062 L 813.8125 576.242188 L 814.378906 573.234375 L 815.113281 570.304688 L 816.089844 567.539062 L 817.390625 564.855469 L 819.425781 561.355469 L 821.945312 558.347656 L 824.792969 555.90625 L 828.046875 553.953125 L 831.625 552.570312 L 835.695312 551.675781 L 836.425781 551.59375 L 837.238281 551.515625 L 837.972656 551.433594 L 839.597656 551.433594 L 840.492188 551.351562 L 845.699219 551.757812 L 850.253906 552.976562 L 854.160156 554.929688 L 857.414062 557.695312 L 860.015625 561.195312 L 862.050781 565.503906 L 862.292969 566.320312 L 862.539062 567.132812 L 862.78125 568.027344 L 862.945312 568.921875 L 863.105469 569.816406 L 863.351562 570.710938 L 855.625 570.710938 L 854.808594 567.863281 L 853.753906 565.425781 L 852.449219 563.308594 L 850.742188 561.519531 L 848.871094 560.136719 L 846.675781 559.078125 L 845.617188 558.753906 L 844.480469 558.511719 L 843.339844 558.347656 L 842.121094 558.183594 L 840.898438 558.101562 L 839.597656 558.023438 L 836.75 558.265625 L 834.148438 558.835938 L 831.707031 559.730469 L 829.511719 561.113281 L 827.476562 562.820312 L 825.769531 564.855469 L 824.304688 567.214844 L 823.085938 569.816406 L 822.109375 572.664062 L 821.457031 575.753906 L 821.050781 579.089844 L 820.96875 582.589844 L 821.050781 586.410156 L 821.539062 589.828125 L 822.351562 593.082031 L 823.492188 595.929688 L 824.957031 598.613281 L 826.746094 600.890625 L 828.535156 602.761719 L 830.488281 604.226562 L 832.601562 605.367188 L 834.960938 606.179688 L 837.484375 606.667969 L 840.25 606.828125 L 843.175781 606.667969 L 845.863281 606.097656 L 848.300781 605.121094 L 850.335938 603.738281 L 852.125 601.949219 L 853.671875 599.753906 L 854.320312 598.449219 L 854.890625 596.988281 L 855.460938 595.441406 L 855.949219 593.734375 L 856.355469 591.941406 L 856.761719 589.992188 L 864.570312 589.992188 L 863.105469 597.230469 L 860.667969 603.085938 L 857.085938 607.644531 L 852.53125 610.898438 L 846.839844 612.769531 L 840.167969 613.5 L 835.449219 613.175781 L 831.21875 612.199219 L 827.394531 610.734375 L 823.980469 608.539062 L 820.96875 605.691406 L 818.449219 602.191406 L 816.984375 599.671875 L 815.765625 596.90625 L 814.789062 593.976562 L 814.054688 590.886719 L 813.566406 587.632812 L 813.40625 584.214844 Z M 813.40625 582.667969 "/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,60.392159%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 812 520 L 858 520 M 812 473 L 858 473 M 812 473 L 812 520 M 858 473 L 858 520 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(19.607843%,89.411765%,88.235295%);stroke-opacity:1;stroke-miterlimit:10;" d="M 812 520 L 858 520 M 812 473 L 858 473 M 858 520 L 858 473 M 812 520 L 812 473 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 1471.304688 675.078125 L 1492.292969 705.5 L 1482.9375 705.5 L 1466.75 680.769531 L 1450.480469 705.5 L 1441.289062 705.5 L 1462.277344 675.078125 L 1442.589844 646.199219 L 1451.785156 646.199219 L 1466.996094 669.464844 L 1482.289062 646.199219 L 1491.316406 646.199219 Z M 1471.304688 675.078125 "/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,60.392159%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 1441 427 L 1488 427 M 1441 380 L 1488 380 M 1441 380 L 1441 427 M 1488 380 L 1488 427 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(19.607843%,89.411765%,88.235295%);stroke-opacity:1;stroke-miterlimit:10;" d="M 1441 427 L 1488 427 M 1441 380 L 1488 380 M 1488 427 L 1488 380 M 1441 427 L 1441 380 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 430.191406 925.5 L 425.425781 925.5 L 412.929688 890.738281 L 417.699219 890.738281 L 427.902344 920.160156 L 437.535156 890.738281 L 442.257812 890.738281 Z M 430.191406 925.5 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 474.0625 890.738281 L 474.0625 925.5 L 469.058594 925.5 L 451.078125 897.316406 L 451.078125 925.5 L 446.882812 925.5 L 446.882812 890.738281 L 451.699219 890.738281 L 469.867188 919.15625 L 469.867188 890.738281 Z M 474.0625 890.738281 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 507.347656 915.582031 L 507.253906 917.105469 L 507.015625 918.488281 L 506.585938 919.777344 L 506.011719 920.921875 L 505.25 922.019531 L 504.34375 922.972656 L 503.34375 923.785156 L 502.292969 924.402344 L 501.101562 924.878906 L 499.863281 925.261719 L 498.527344 925.453125 L 497.097656 925.5 L 481.40625 925.5 L 481.40625 890.738281 L 495.523438 890.738281 L 497.574219 890.878906 L 499.386719 891.214844 L 501.007812 891.785156 L 502.390625 892.597656 L 503.582031 893.644531 L 504.535156 894.933594 L 504.917969 895.648438 L 505.25 896.410156 L 505.488281 897.125 L 505.679688 897.9375 L 505.773438 898.75 L 505.824219 899.558594 L 505.679688 901.277344 L 505.25 902.753906 L 504.582031 904.136719 L 503.628906 905.28125 L 502.4375 906.332031 L 501.007812 907.140625 L 502.390625 907.761719 L 503.582031 908.429688 L 504.628906 909.191406 L 505.488281 910.050781 L 506.15625 910.957031 L 506.679688 911.910156 L 506.871094 912.480469 L 507.015625 913.054688 L 507.15625 913.625 L 507.253906 914.292969 L 507.300781 914.914062 Z M 501.386719 900.179688 L 501.246094 898.75 L 500.816406 897.554688 L 500.148438 896.507812 L 499.195312 895.742188 L 498.003906 895.171875 L 496.523438 894.789062 L 496.191406 894.789062 L 495.855469 894.742188 L 495.523438 894.695312 L 494.757812 894.695312 L 494.425781 894.648438 L 485.84375 894.648438 L 485.84375 905.710938 L 494.425781 905.710938 L 496.191406 905.613281 L 497.714844 905.328125 L 499.003906 904.804688 L 499.957031 904.089844 L 500.71875 903.136719 L 501.195312 901.992188 L 501.246094 901.753906 L 501.292969 901.464844 L 501.339844 901.179688 L 501.339844 900.511719 Z M 496.667969 921.589844 L 498.003906 921.542969 L 499.195312 921.257812 L 500.242188 920.777344 L 501.101562 920.160156 L 501.816406 919.347656 L 502.390625 918.347656 L 502.53125 917.964844 L 502.628906 917.535156 L 502.769531 917.058594 L 502.820312 916.628906 L 502.867188 916.152344 L 502.914062 915.628906 L 502.820312 914.578125 L 502.628906 913.578125 L 502.292969 912.71875 L 501.816406 911.910156 L 501.195312 911.242188 L 500.480469 910.621094 L 499.957031 910.335938 L 499.386719 910.097656 L 498.765625 909.90625 L 498.097656 909.765625 L 497.382812 909.667969 L 496.667969 909.621094 L 485.84375 909.621094 L 485.84375 921.589844 Z M 496.667969 921.589844 "/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,60.392159%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 434 194 L 481 194 M 434 148 L 481 148 M 434 148 L 434 194 M 481 148 L 481 194 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(19.607843%,89.411765%,88.235295%);stroke-opacity:1;stroke-miterlimit:10;" d="M 434 194 L 481 194 M 434 148 L 481 148 M 481 194 L 481 148 M 434 194 L 434 148 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 431.191406 181.5 L 426.425781 181.5 L 413.929688 146.738281 L 418.699219 146.738281 L 428.902344 176.160156 L 438.535156 146.738281 L 443.257812 146.738281 Z M 431.191406 181.5 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 473.679688 156.941406 L 473.585938 158.46875 L 473.347656 159.851562 L 472.917969 161.136719 L 472.394531 162.28125 L 471.628906 163.332031 L 470.773438 164.285156 L 469.820312 165.097656 L 468.816406 165.714844 L 467.71875 166.191406 L 466.527344 166.527344 L 465.289062 166.71875 L 463.953125 166.765625 L 453.03125 166.765625 L 453.03125 181.5 L 448.597656 181.5 L 448.597656 146.738281 L 462.953125 146.738281 L 465.003906 146.878906 L 466.863281 147.214844 L 468.484375 147.785156 L 469.914062 148.597656 L 471.105469 149.597656 L 472.105469 150.839844 L 472.585938 151.742188 L 472.964844 152.648438 L 473.25 153.605469 L 473.488281 154.652344 L 473.632812 155.796875 Z M 453.03125 162.855469 L 462.285156 162.855469 L 463.570312 162.808594 L 464.714844 162.570312 L 465.765625 162.234375 L 466.671875 161.710938 L 467.433594 161.042969 L 468.101562 160.230469 L 468.339844 159.753906 L 468.578125 159.183594 L 468.769531 158.660156 L 468.914062 158.039062 L 469.007812 157.417969 L 469.054688 156.75 L 468.960938 155.605469 L 468.722656 154.558594 L 468.339844 153.652344 L 467.816406 152.839844 L 467.101562 152.171875 L 466.289062 151.601562 L 465.71875 151.363281 L 465.097656 151.125 L 464.429688 150.933594 L 463.761719 150.789062 L 463.046875 150.695312 L 462.285156 150.648438 L 453.03125 150.648438 Z M 453.03125 162.855469 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 505.726562 171.582031 L 505.628906 173.105469 L 505.390625 174.488281 L 504.960938 175.777344 L 504.390625 176.921875 L 503.628906 178.019531 L 502.722656 178.972656 L 501.71875 179.785156 L 500.671875 180.402344 L 499.480469 180.878906 L 498.238281 181.261719 L 496.902344 181.453125 L 495.472656 181.5 L 479.785156 181.5 L 479.785156 146.738281 L 493.898438 146.738281 L 495.949219 146.878906 L 497.761719 147.214844 L 499.382812 147.785156 L 500.765625 148.597656 L 501.957031 149.644531 L 502.914062 150.933594 L 503.292969 151.648438 L 503.628906 152.410156 L 503.867188 153.125 L 504.058594 153.9375 L 504.152344 154.75 L 504.199219 155.558594 L 504.058594 157.277344 L 503.628906 158.753906 L 502.960938 160.136719 L 502.007812 161.28125 L 500.8125 162.332031 L 499.382812 163.140625 L 500.765625 163.761719 L 501.957031 164.429688 L 503.007812 165.191406 L 503.867188 166.050781 L 504.535156 166.957031 L 505.058594 167.910156 L 505.25 168.480469 L 505.390625 169.054688 L 505.535156 169.625 L 505.628906 170.292969 L 505.679688 170.914062 Z M 499.765625 156.179688 L 499.621094 154.75 L 499.191406 153.554688 L 498.523438 152.507812 L 497.570312 151.742188 L 496.378906 151.171875 L 494.902344 150.789062 L 494.566406 150.789062 L 494.234375 150.742188 L 493.898438 150.695312 L 493.136719 150.695312 L 492.804688 150.648438 L 484.21875 150.648438 L 484.21875 161.710938 L 492.804688 161.710938 L 494.566406 161.613281 L 496.09375 161.328125 L 497.378906 160.804688 L 498.335938 160.089844 L 499.097656 159.136719 L 499.574219 157.992188 L 499.621094 157.753906 L 499.667969 157.464844 L 499.71875 157.179688 L 499.71875 156.511719 Z M 495.042969 177.589844 L 496.378906 177.542969 L 497.570312 177.257812 L 498.621094 176.777344 L 499.480469 176.160156 L 500.195312 175.347656 L 500.765625 174.347656 L 500.910156 173.964844 L 501.003906 173.535156 L 501.148438 173.058594 L 501.195312 172.628906 L 501.242188 172.152344 L 501.292969 171.628906 L 501.195312 170.578125 L 501.003906 169.578125 L 500.671875 168.71875 L 500.195312 167.910156 L 499.574219 167.242188 L 498.859375 166.621094 L 498.335938 166.335938 L 497.761719 166.097656 L 497.140625 165.90625 L 496.476562 165.765625 L 495.757812 165.667969 L 495.042969 165.621094 L 484.21875 165.621094 L 484.21875 177.589844 Z M 495.042969 177.589844 "/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,60.392159%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 434 938 L 481 938 M 434 892 L 481 892 M 434 892 L 434 938 M 481 892 L 481 938 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(19.607843%,89.411765%,88.235295%);stroke-opacity:1;stroke-miterlimit:10;" d="M 434 938 L 481 938 M 434 892 L 481 892 M 481 938 L 481 892 M 434 938 L 434 892 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 411.191406 925.402344 L 406.425781 925.402344 L 393.929688 890.640625 L 398.699219 890.640625 L 408.902344 920.0625 L 418.535156 890.640625 L 423.257812 890.640625 Z M 411.191406 925.402344 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 430.792969 908.140625 L 430.839844 909.761719 L 430.984375 911.289062 L 431.269531 912.71875 L 431.648438 914.148438 L 432.175781 915.484375 L 432.84375 916.722656 L 433.988281 918.488281 L 435.371094 919.917969 L 436.941406 921.0625 L 438.707031 921.875 L 440.710938 922.398438 L 442.902344 922.589844 L 443.238281 922.589844 L 444.714844 922.542969 L 446.148438 922.304688 L 447.433594 921.875 L 448.675781 921.351562 L 449.820312 920.632812 L 450.914062 919.730469 L 451.820312 918.773438 L 452.585938 917.726562 L 453.203125 916.535156 L 453.632812 915.292969 L 453.917969 913.957031 L 454.109375 912.527344 L 454.109375 912.050781 L 454.15625 911.90625 L 454.15625 910.953125 L 443.570312 910.953125 L 443.570312 907.042969 L 458.066406 907.042969 L 458.066406 925.59375 L 455.253906 925.59375 L 454.15625 920.96875 L 452.632812 922.496094 L 451.011719 923.78125 L 449.339844 924.832031 L 447.578125 925.546875 L 445.765625 926.070312 L 443.90625 926.40625 L 443.332031 926.40625 L 443.09375 926.453125 L 442.523438 926.453125 L 442.285156 926.5 L 440.28125 926.355469 L 438.375 926.023438 L 436.5625 925.5 L 434.894531 924.734375 L 433.320312 923.734375 L 431.839844 922.496094 L 430.503906 921.160156 L 429.359375 919.632812 L 428.40625 918.011719 L 427.644531 916.199219 L 427.023438 914.246094 L 426.644531 912.148438 L 426.546875 911.574219 L 426.453125 910.953125 L 426.40625 910.335938 L 426.355469 909.667969 L 426.355469 908.378906 L 426.40625 906.613281 L 426.59375 904.898438 L 426.882812 903.230469 L 427.359375 901.609375 L 427.882812 900.035156 L 428.597656 898.460938 L 429.789062 896.457031 L 431.171875 894.695312 L 432.84375 893.214844 L 434.652344 892.023438 L 436.703125 891.117188 L 438.992188 890.449219 L 439.613281 890.355469 L 440.28125 890.257812 L 440.949219 890.210938 L 441.617188 890.117188 L 442.332031 890.117188 L 443.046875 890.066406 L 445.335938 890.210938 L 447.480469 890.542969 L 449.4375 891.117188 L 451.203125 891.929688 L 452.773438 892.976562 L 454.207031 894.214844 L 455.015625 895.171875 L 455.730469 896.21875 L 456.351562 897.363281 L 456.875 898.554688 L 457.257812 899.84375 L 457.589844 901.179688 L 453.0625 901.179688 L 452.679688 899.9375 L 452.203125 898.792969 L 451.535156 897.746094 L 450.773438 896.839844 L 449.820312 896.027344 L 448.769531 895.3125 L 447.910156 894.933594 L 447.003906 894.597656 L 446.050781 894.3125 L 445.097656 894.167969 L 444.046875 894.027344 L 443 893.976562 L 441.234375 894.121094 L 439.613281 894.40625 L 438.136719 894.882812 L 436.753906 895.597656 L 435.464844 896.503906 L 434.320312 897.601562 L 433.269531 898.9375 L 432.414062 900.414062 L 431.746094 902.039062 L 431.222656 903.800781 L 430.886719 905.707031 L 430.792969 907.757812 Z M 430.792969 908.140625 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 492.117188 890.640625 L 492.117188 925.402344 L 487.109375 925.402344 L 469.132812 897.222656 L 469.132812 925.402344 L 464.933594 925.402344 L 464.933594 890.640625 L 469.75 890.640625 L 487.917969 919.0625 L 487.917969 890.640625 Z M 492.117188 890.640625 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 499.9375 925.402344 L 499.9375 890.640625 L 513.335938 890.640625 L 515.433594 890.785156 L 517.390625 891.164062 L 519.203125 891.832031 L 520.871094 892.691406 L 522.347656 893.882812 L 523.730469 895.265625 L 524.875 896.933594 L 525.828125 898.746094 L 526.542969 900.796875 L 527.070312 902.992188 L 527.355469 905.421875 L 527.5 907.996094 L 527.355469 910.714844 L 527.023438 913.242188 L 526.449219 915.53125 L 525.6875 917.628906 L 524.683594 919.488281 L 523.445312 921.113281 L 522.109375 922.445312 L 520.632812 923.496094 L 519.011719 924.355469 L 517.246094 924.925781 L 515.339844 925.308594 L 513.335938 925.402344 Z M 504.371094 921.492188 L 512.574219 921.492188 L 514.765625 921.351562 L 516.722656 920.824219 L 518.4375 919.917969 L 519.867188 918.726562 L 521.011719 917.105469 L 521.96875 915.152344 L 522.253906 914.148438 L 522.539062 913.101562 L 522.777344 911.957031 L 522.921875 910.714844 L 523.015625 909.429688 L 523.0625 908.046875 L 522.875 904.945312 L 522.394531 902.226562 L 521.539062 899.890625 L 520.394531 898.03125 L 518.914062 896.503906 L 517.101562 895.410156 L 516.433594 895.171875 L 515.71875 894.933594 L 514.195312 894.644531 L 513.382812 894.597656 L 512.574219 894.550781 L 504.371094 894.550781 Z M 504.371094 921.492188 "/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,60.392159%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 434 194 L 481 194 M 434 148 L 481 148 M 434 148 L 434 194 M 481 148 L 481 194 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(19.607843%,89.411765%,88.235295%);stroke-opacity:1;stroke-miterlimit:10;" d="M 434 194 L 481 194 M 434 148 L 481 148 M 481 194 L 481 148 M 434 194 L 434 148 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 407.191406 181.5 L 402.425781 181.5 L 389.929688 146.738281 L 394.699219 146.738281 L 404.902344 176.160156 L 414.535156 146.738281 L 419.257812 146.738281 Z M 407.191406 181.5 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 449.679688 156.941406 L 449.585938 158.46875 L 449.347656 159.851562 L 448.917969 161.136719 L 448.394531 162.28125 L 447.628906 163.332031 L 446.773438 164.285156 L 445.820312 165.097656 L 444.816406 165.714844 L 443.71875 166.191406 L 442.527344 166.527344 L 441.289062 166.71875 L 439.953125 166.765625 L 429.03125 166.765625 L 429.03125 181.5 L 424.597656 181.5 L 424.597656 146.738281 L 438.953125 146.738281 L 441.003906 146.878906 L 442.863281 147.214844 L 444.484375 147.785156 L 445.914062 148.597656 L 447.105469 149.597656 L 448.105469 150.839844 L 448.585938 151.742188 L 448.964844 152.648438 L 449.25 153.605469 L 449.488281 154.652344 L 449.632812 155.796875 Z M 429.03125 162.855469 L 438.285156 162.855469 L 439.570312 162.808594 L 440.714844 162.570312 L 441.765625 162.234375 L 442.671875 161.710938 L 443.433594 161.042969 L 444.101562 160.230469 L 444.339844 159.753906 L 444.578125 159.183594 L 444.769531 158.660156 L 444.914062 158.039062 L 445.007812 157.417969 L 445.054688 156.75 L 444.960938 155.605469 L 444.722656 154.558594 L 444.339844 153.652344 L 443.816406 152.839844 L 443.101562 152.171875 L 442.289062 151.601562 L 441.71875 151.363281 L 441.097656 151.125 L 440.429688 150.933594 L 439.761719 150.789062 L 439.046875 150.695312 L 438.285156 150.648438 L 429.03125 150.648438 Z M 429.03125 162.855469 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 487.496094 181.5 L 482.632812 181.5 L 474.621094 152.9375 L 466.847656 181.5 L 461.984375 181.5 L 453.066406 146.738281 L 458.027344 146.738281 L 464.558594 174.96875 L 472.285156 146.738281 L 477.050781 146.738281 L 484.96875 174.96875 L 491.359375 146.738281 L 496.316406 146.738281 Z M 487.496094 181.5 "/>
<path style=" stroke:none;fill-rule:nonzero;comp-op:src;clip-to-self:true;fill:rgb(0%,0%,60.392159%);fill-opacity:0.724409;" d="M 522.542969 164.332031 L 523.640625 164.953125 L 524.644531 165.621094 L 525.5 166.382812 L 526.167969 167.289062 L 526.644531 168.242188 L 527.027344 169.292969 L 527.121094 169.863281 L 527.21875 170.484375 L 527.265625 171.199219 L 527.3125 172.011719 L 527.3125 173.917969 L 527.265625 174.917969 L 527.3125 175.777344 L 527.359375 176.539062 L 527.457031 177.207031 L 527.550781 177.78125 L 527.742188 178.257812 L 527.886719 178.734375 L 528.125 179.117188 L 528.363281 179.496094 L 528.648438 179.832031 L 528.984375 180.164062 L 529.363281 180.402344 L 529.363281 181.5 L 523.976562 181.5 L 523.6875 180.738281 L 523.449219 179.925781 L 523.261719 178.972656 L 523.117188 178.019531 L 523.023438 176.96875 L 523.023438 172.726562 L 522.925781 171.34375 L 522.6875 170.101562 L 522.304688 169.054688 L 521.734375 168.195312 L 521.019531 167.527344 L 520.160156 167.003906 L 519.730469 166.859375 L 519.300781 166.765625 L 518.824219 166.667969 L 518.347656 166.621094 L 517.300781 166.527344 L 505.855469 166.527344 L 505.855469 181.5 L 501.421875 181.5 L 501.421875 146.738281 L 517.441406 146.738281 L 519.589844 146.878906 L 521.542969 147.214844 L 523.210938 147.832031 L 524.644531 148.644531 L 525.835938 149.695312 L 526.789062 150.980469 L 527.121094 151.742188 L 527.457031 152.507812 L 527.695312 153.316406 L 527.886719 154.175781 L 527.980469 155.082031 L 528.027344 156.035156 L 527.933594 157.324219 L 527.742188 158.515625 L 527.410156 159.613281 L 526.933594 160.613281 L 526.359375 161.519531 L 525.644531 162.28125 L 525.214844 162.664062 L 524.738281 163.046875 L 524.261719 163.378906 L 523.738281 163.714844 L 523.164062 164.046875 Z M 523.402344 156.65625 L 523.261719 155.226562 L 522.972656 153.984375 L 522.402344 152.9375 L 521.6875 152.078125 L 520.683594 151.457031 L 519.539062 150.980469 L 519.113281 150.886719 L 518.632812 150.789062 L 518.15625 150.742188 L 517.632812 150.695312 L 517.109375 150.695312 L 516.585938 150.648438 L 505.855469 150.648438 L 505.855469 162.617188 L 516.585938 162.617188 L 518.15625 162.570312 L 519.539062 162.28125 L 520.683594 161.851562 L 521.640625 161.234375 L 522.402344 160.46875 L 522.925781 159.515625 L 523.070312 159.136719 L 523.164062 158.660156 L 523.261719 158.230469 L 523.308594 157.703125 L 523.355469 157.226562 Z M 523.402344 156.65625 "/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(0%,0%,60.392159%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 434 938 L 481 938 M 434 892 L 481 892 M 434 892 L 434 938 M 481 892 L 481 938 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(19.607843%,89.411765%,88.235295%);stroke-opacity:1;stroke-miterlimit:10;" d="M 434 938 L 481 938 M 434 892 L 481 892 M 481 938 L 481 892 M 434 938 L 434 892 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
<path style="fill:none;stroke-width:2;stroke-linecap:butt;stroke-linejoin:miter;stroke:rgb(100%,100%,0%);stroke-opacity:0.724409;stroke-miterlimit:10;" d="M 686 427 L 733 427 M 686 380 L 733 380 M 686 380 L 686 427 M 733 380 L 733 427 M 434 520 L 481 520 M 434 473 L 481 473 M 434 473 L 434 520 M 481 473 L 481 520 M 434 613 L 481 613 M 434 566 L 481 566 M 434 566 L 434 613 M 481 566 L 481 613 M 434 706 L 481 706 M 434 659 L 481 659 M 434 659 L 434 706 M 481 659 L 481 706 M 434 799 L 481 799 M 434 752 L 481 752 M 434 752 L 434 799 M 481 752 L 481 799 M 395 167 L 395 174 M 391 171 L 398 171 " transform="matrix(1,0,0,-1,0.5,1079.5)"/>
</g>
</svg>

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@ -9,7 +9,7 @@
<link rel="stylesheet" href="dist/reset.css">
<link rel="stylesheet" href="dist/reveal.css">
<link rel="stylesheet" href="dist/theme/black.css">
<link rel="stylesheet" href="dist/theme/moon.css">
<!-- Theme used for syntax highlighted code -->
<link rel="stylesheet" href="plugin/highlight/monokai.css">
@ -18,7 +18,10 @@
<body>
<div class="reveal">
<div class="slides">
<section>The State of Open Silicon</section>
<section>
<h1>The State of Open Silicon</h1>
<h2>Sean Cross, Foosn PTE Ltd</h2>
</section>
<section>
<h2>About Me</h2>
</section>
@ -34,22 +37,36 @@
<section>
<section>
<h2>What does it mean to be "open"?</h2>
<div class="r-hstack">
<div>
<div>Availability of:</div>
<ol>
<li>Manuals available</li>
<li>Source available</li>
<li>Tooling available</li>
<li>GDSII available</li>
<li data-fragment-index="1" class="fragment highlight-current-blue">Manuals</li>
<li data-fragment-index="2" class="fragment highlight-current-blue">Source</li>
<li data-fragment-index="3" class="fragment highlight-current-blue">Tooling</li>
<li data-fragment-index="4" class="fragment highlight-current-blue">GDSII</li>
</ol>
</div>
<div class="r-stack">
<img data-src="img/documentation-example.png" class="fragment fade-in-then-out"
data-fragment-index="1">
<img data-src="img/code-example.png" class="fragment fade-in-then-out"
data-fragment-index="2">
<img data-src="img/openlane-flow-v1.png" height="500" class="fragment fade-in-then-out"
data-fragment-index="3">
<img data-src="img/pmosfet.png" class="fragment fade-in" data-fragment-index="4">
</div>
</div>
</section>
<section>
<h2>Parts of chip design</h2>
<ul>
<ol>
<li>Nondisclosure Agreements</li>
<li>Process Design Kit (PDK)</li>
<li>IP (libraries)</li>
<li>Tooling</li>
<li>Fabrication method</li>
</ul>
<li>EDA software (tooling)</li>
<!-- <li>Fabrication method</li> -->
</ol>
</section>
<section>
<h2>Nondisclosure Agreements</h2>
@ -57,66 +74,80 @@
</section>
<section>
<h2>Process Design Kit</h2>
<div class="r-vstack">
<img data-src="img/metal_stack.svg" height="450" style="background-color: white;">
<p>Example PDK stackup</p>
</div>
<aside class="notes">
<ul>
<li>https://skywater-pdk.readthedocs.io/en/main/_images/metal_stack.svg</li>
<li>Process design kits (PDKs) are closed and under NDA</li>
<li>Mostly just a blank canvas</li>
</ul>
</aside>
</section>
<section>
<h2>IP / Libraries</h2>
<div class="r-vstack">
<ul>
<li>Memories</li>
<li>IO blocks</li>
<li>Standard cells</li>
</ul>
<img data-src="img/gf180mcu_fd_sc_mcu7t5v0__latq_1.layout.png">
</div>
</section>
<section>
<h2>Digital design (In The Beginning)</h2>
<ul>
<li>[Picture of Z80 or 6502]</li>
<li>Magic</li>
<li>[Picture of Siliwiz]</li>
</ul>
<div class="r-vstack">
<img data-src="img/6502-die-shot.jpg" height="450">
<p>Motorola 6502, image &copy; 2016 Pauli Rautakorpi</p>
</div>
</section>
<section>
<h2>Digital logic overview (Today)</h2>
<ul>
<li>Standard cells</li>
<li>Basic boolean logic</li>
</ul>
<pre data-id="code-animation"><code class="hljs verilog" data-trim data-line-numbers>
module inverter(input clk, input [15:0] A, output [15:0] X);
reg [15:0] R;
assign X = R;
always @(posedge clk)
begin
R <= ~A;
end
endmodule
</code></pre>
<img data-src="img/gf180mcu_fd_sc_mcu7t5v0__inv_16.layout.png">
</section>
<section>
<h2>How can we use standard cells?</h2>
<ul>
<li>Manual synthesis</li>
<li>Automated synthesis</li>
</ul>
Almost all code is automatically synthesized from source code!
[Example of live generation of cells]
<h2>GD32F103CBT6</h2>
<div class="r-stack r-stretch">
<img data-src="img/GD32F103CBT6-zeptobars.jpg" class="fragment fade-in-then-out">
<img data-src="img/GD32F103CBT6-SC1-50.jpg" class="fragment fade-in-then-out">
<img data-src="img/GD32F103CBT6-SC2-50.jpg" class="fragment fade-in-then-out">
</div>
<p>Image &copy; 2016 Zeptobars</p>
</section>
<section>
<h2>Tooling</h2>
<ul>
<li>Synthesis</li>
<li>Power generation</li>
<li>Clock tree</li>
<li>Clock tree synthesis</li>
<li>Place and route</li>
<li>Verification</li>
<li><strong>Industry tools cost $1mm plus per seat</strong></li>
</ul>
<p class="fragment highlight-red">Industry tools cost $1mm plus per seat</p>
</section>
<section>
<!-- <section>
<h2>Method to tape out</h2>
<ul>
<li>Shuttle runs</li>
<li>Full wafer</li>
<li>Turnaround time is in months</li>
</ul>
</section>
</section> -->
</section>
<section>
<section>
@ -126,119 +157,137 @@
<h2>Things are looking pretty good!</h2>
</section>
<section>
<h2>Nondisclosure Agreements</h2>
NDAs are required for using many packages
<h2 class="fragment strike highlight-green">Nondisclosure Agreements</h2>
</section>
<section>
<h2>Open PDKs</h2>
<div class="r-hstack">
<ul>
<li>Real PDKs</li>
<ul>
<li>SKY130</li>
<li>SKY90FD</li>
<li>GF180MCU </li>
<li>GF180MCU</li>
<li>SG13G2</li>
</ul>
<li>"Fake" PDKs</li>
<ul>
<li>FreePDK45</li>
<li>ASAP5 </li>
<li>ASAP5</li>
<li>Many more!</li>
</ul>
</ul>
<img data-src="img/sky130-designrules.png" height="500">
</div>
</section>
<section>
<h2>Available IP</h2>
<p>Projects that have been taped out</p>
<div class="r-hstack">
<img data-src="img/Riscduino_Soc.png" height="500">
<ul>
<li>ADC</li>
<li>LDO</li>
<li>Bandgap</li>
<li>CPU</li>
<li>DAC</li>
<li>...more...</li>
<li>ADC</li>
<li>SPI</li>
<li>USB</li>
<li>PLL</li>
<li>FPGA</li>
<li>AES</li>
</ul>
</div>
</section>
<section>
<h2>Standard cells</h2>
<div>
<ul>
<li>SKY130</li>
<li>GF180MCU</li>
<li>OSU</li>
<li>OSU018</li>
<li>LibreSilicon</li>
</ul>
<img data-src="img/sky130_fd_sc_hd__dfrbp_2-zoomed.svg">
</div>
</section>
<section>
<h2>What about tooling?</h2>
</section>
<section>
<h2>Hardware Synthesis</h2>
<div class="r-hstack">
<img data-src="img/yosys-startup.jpg">
<ul>
<li>Yosys (Verilog)</li>
<li>Plugins:</li>
<ul>
<li>GHDL (VHDL)</li>
<li>SystemVerilog</li>
<li>UHDM (SystemVerilog)</li>
</ul>
</ul>
</div>
</section>
<section>
<h2>High level languages</h2>
<ul>
<li>LiteX <i>Python</i></li>
<li>SpinalHDL <i>Scala</i></li>
<li>Clash</li>
<li>Chisel <i>Scala</i></li>
<li>Clash <i>Haskell</i></li>
</ul>
</section>
<section>
<h2>Floorplanning, Placement, Routing, PDN, etc...</h2>
<h2>Placement, Routing, PDN, etc...</h2>
<img data-src="img/openroad-gui.jpg">
<aside class="notes">
<ul>
<li>OpenROAD</li>
<li>Integrates other tools natively</li>
<li>Competitive with closed tools</li>
</ul>
</aside>
</section>
<section>
<h2>Direct Cell Design and Inspection</h2>
<img data-src="img/klayout-gui.jpg" class="r-stretch">
<!-- <ul>
<li>Magic</li>
<li>KLayout</li>
</ul> -->
</section>
<section>
<h2>Simulation</h2>
<div class="r-hstack">
<ul>
<li>GHDL</li>
<li>Icarus Verilog</li>
<li>Verilator</li>
<li>GTKWave</li>
<li>Spice</li>
</ul>
<img data-src="img/gtkwave-gui.png">
</div>
</section>
<section>
<h2>Direct Cell Design and Inspection</h2>
<ul>
<li>Magic</li>
<li>KLayout</li>
</ul>
</section>
<section>
<h2>What about taping out chips?</h2>
<ul>
<li>Google OpenMPW shuttles</li>
<li>MPW shuttle runs</li>
</ul>
</section>
</section>
<section>
<section>
<h1># What can't we do today?</h1>
<h2>What can't we do today?</h2>
</section>
<section>
<h2>PDKs are large nodes</h2>
<ul>
<li>Gamecube CPU "Gekko": 43 mm<sup>2</sup> (2001)</li>
</ul>
<h2>Examples of 180 nm</h2>
<ul>
<li>Playstation 2 "Emotion Engine"</li>
<div class="r-stack">
<ul class="fragment fade-in-then-out">
<li>180nm: Playstation 2 "Emotion Engine"</li>
<li>130nm: Gamecube CPU "Gekko": 43 mm<sup>2</sup> (2001)</li>
</ul>
<div class="fragment fade-in-then-out">
<img data-src="img/blinker-HD.jpg" height="400">
<p>Flicker LED circuit, 3µm, image &copy; 2015 Zeptobars</p>
</div>
</div>
</section>
<section>
<h2>Memories are still hard</h2>
<ul>
<div class="r-stack">
<ul class="fragment fade-in-then-out">
<li>Density is constantly improving</li>
<li>Expect kilobytes of RAM on a chip</li>
<ul>
@ -247,6 +296,8 @@
<li>A ~4x increase is possible</li>
<li>Experimental ROM support</li>
</ul>
<img data-src="img/minimax-cpu-vs-memories.jpg" class="fragment fade-in-then-out">
</div>
</section>
<section>
<h2>Nonvolatile storage is still hard</h2>
@ -262,6 +313,19 @@
<li>Need more integration examples</li>
</ul>
</section>
<section>
<h2>What about taping out chips?</h2>
<ul>
<li>Google OpenMPW</li>
<li>ChipIgnite</li>
<li>EuroPractice</li>
<li>Muse</li>
<li>SIMC</li>
</ul>
<div class="fade-in fragment">
<div class="fragment highlight-red">Expect to pay $10,000 - $50,000</div>
</div>
</section>
</section>
<section>
<section>
@ -269,34 +333,44 @@
<h3>And how you help</h3>
</section>
<section>
<h2>Boon for education</h2>
<ul>
<h2>More open projects</h2>
<img data-src="img/openmpw-shuttle.jpg">
</section>
<section>
<h2>Education</h2>
<img data-src="img/tinytapeout.jpg">
<p>tinytapeout.com</p>
<!-- <ul>
<li>NDA-free design</li>
<li>Many more hobbyists</li>
<li>Zero-to-ASIC course</li>
</ul>
</ul> -->
</section>
<section>
<h2>Smaller process nodes</h2>
<h2>More analogue design</h2>
<div class="r-vstack">
<img data-src="img/siliwiz-gui.png" height="450">
<p>app.siliwiz.com</p>
</div>
<!-- <ul>
<li>Siliwiz</li>
</ul> -->
</section>
<section>
<h2>Smaller process nodes?</h2>
<ul>
<li>OpenROAD has been tested on smaller nodes</li>
<li>No NDA-free PDKs yet</li>
</ul>
</section>
<section>
<h2>More analogue design</h2>
<ul>
<li>Siliwiz</li>
</ul>
</section>
<section>
<h2>More involvement</h2>
<ul>
<li>OpenMPW</li>
<li>Tiny Tapeout</li>
<li>Siliwiz</li>
<li>OpenMPW</li>
</ul>
<h2>Thank you</h2>
<h2 class="fragment">Thank you</h2>
</section>
</section>
</div>